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Volumn 603, Issue 13, 2009, Pages 2047-2056

The backscattering factor for systems with a non-uniform surface region: Definition and calculations

Author keywords

Auger ejection; Computer simulations; Copper; Electron bombardment; Electron solid interactions; Gold; Silicon; Silver

Indexed keywords

AUGER EJECTION; AUGER TRANSITIONS; BACKSCATTERING FACTORS; BURIED LAYERS; COMPOSITION PROFILES; DEPTH DEPENDENCES; DEPTH PROFILES; DEPTH STRUCTURES; ELECTRON BOMBARDMENT; ELECTRON-SOLID INTERACTIONS; LOWER ENERGIES; MATRIX MATERIALS; NON-UNIFORM; PRIMARY BEAM ENERGIES; SIGNAL INTENSITIES; SPUTTER-DEPTH PROFILING; SPUTTERING TIME; SURFACE REGIONS; THIN LAYERS;

EID: 65549108287     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2009.03.024     Document Type: Article
Times cited : (5)

References (41)
  • 22
    • 65549160265 scopus 로고    scopus 로고
    • A. Jablonski, F. Salvat, C.J. Powell, NIST Electron Elastic-Scattering Cross-Section Database, Version 3.1, Standard Reference Data Program Database 64, U.S. Department of Commerce, National Institute of Standards and Technology, Gaithersburg, MD, 2003. .
    • A. Jablonski, F. Salvat, C.J. Powell, NIST Electron Elastic-Scattering Cross-Section Database, Version 3.1, Standard Reference Data Program Database 64, U.S. Department of Commerce, National Institute of Standards and Technology, Gaithersburg, MD, 2003. .
  • 26
    • 65549091729 scopus 로고    scopus 로고
    • private communication
    • S. Tanuma, private communication.
    • Tanuma, S.1
  • 34
    • 65549169383 scopus 로고    scopus 로고
    • A. Jablonski, in: D.A. Degras, M. Costa (Eds.), Proceedings of the 4th International Conference on Solid Surfaces and the 3rd European Conference on Surface Science, Cannes, 1980, Societe Francaise du Vide, Supplement a la Revue Le Vide, les Couches Minces no. 201, Paris, 1980.
    • A. Jablonski, in: D.A. Degras, M. Costa (Eds.), Proceedings of the 4th International Conference on Solid Surfaces and the 3rd European Conference on Surface Science, Cannes, 1980, Societe Francaise du Vide, Supplement a la Revue "Le Vide, les Couches Minces" no. 201, Paris, 1980.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.