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Volumn 601, Issue 4, 2007, Pages 965-977

A universal algorithm for calculating the backscattering factor in Auger-electron spectroscopy

Author keywords

Auger ejection; Computer simulations; Copper; Electron bombardment; Electron solid interactions; Gold; Silicon; Silver

Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; BACKSCATTERING; COMPUTER SIMULATION; IONIZATION;

EID: 33846810083     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.11.028     Document Type: Article
Times cited : (9)

References (48)
  • 2
    • 33846793740 scopus 로고    scopus 로고
    • R. Shimizu, S. Ichimura, Quantitative Analysis by Auger Electron Spectroscopy, Toyota Foundation Research Report No. I-006 76-0175, Tokyo, 1981.
  • 12
    • 33846793741 scopus 로고    scopus 로고
    • S. Tanuma, C.J. Powell, D.R. Penn, to be published.
  • 15
    • 33846789818 scopus 로고    scopus 로고
    • Annual Book of ASTM Standards 2005, vol. 03.06, Standard Terminology Relating to Surface Analysis, Standard E 673-03, ASTM International, West Conshohocken, PA, 2005, p. 647.
  • 16
    • 33846791295 scopus 로고    scopus 로고
    • ISO Standard 18115: Surface Chemical Analysis - Vocabulary, International Organization for Standardization, Geneva, 2001.
  • 30
    • 33846790482 scopus 로고    scopus 로고
    • Stopping Powers for Electrons and Positrons, ICRU Report 37, International Commission on Radiation Units and Measurements, Bethesda, MD, 1984.
  • 31
    • 33846787395 scopus 로고    scopus 로고
    • M.J. Berger, J.S. Coursey, M.A. Zucker, Stopping-Power and Range Tables for Electrons, Positrons and Helium Ions, http://physics.nist.gov/PhysRefData/Star/Text/contents.html.
  • 34
    • 33846793112 scopus 로고    scopus 로고
    • University of Tennessee
    • Joy D.C. A Database of Electron-Solid Interactions. Metrology and Lithography Group (2004), University of Tennessee. http://pciserver.bio.utk.edu/metrology
    • (2004) Metrology and Lithography Group
    • Joy, D.C.1
  • 37
    • 33846824200 scopus 로고    scopus 로고
    • S. Tanuma, private communication.
  • 45
    • 0002010637 scopus 로고
    • Erratum, Comput. Phys. Commun. 13 (1977) 71
    • Desclaux J.P. Comput. Phys. Commun. 9 (1975) 31 Erratum, Comput. Phys. Commun. 13 (1977) 71
    • (1975) Comput. Phys. Commun. , vol.9 , pp. 31
    • Desclaux, J.P.1
  • 48
    • 33846789162 scopus 로고    scopus 로고
    • NIST X-ray Photoelectron Spectroscopy Database, Version 3.4 (Web Version), Standard Reference Data Program Database 20, National Institute of Standards and Technology, Gaithersburg, 2003, http://srdata.nist.gov/xps/.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.