Improved calculation of the backscattering factor for quantitative analysis by Auger electron spectroscopy

Journal of Applied Physics

Volumn 99, Issue 8, 2006, Pages

  Ding, Z J ^a   Tan, W S ^a   Li, Y G ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ELECTRON SCATTERING; ELECTRONS; IONIZATION; MONTE CARLO METHODS;

ELECTRON INELASTIC SCATTERING; ELECTRON TRAJECTORIES; MONTE CARLO MODEL; OVERVOLTAGE RATIOS;

BACKSCATTERING;

EID: 33646716630     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2189928     Document Type: Article

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