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Volumn 29, Issue 4, 2011, Pages

Crystallinity-retaining removal of germanium by direct-write focused electron beam induced etching

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHLORINE; CRYSTALLINITY; ELECTRON BEAMS; ELECTRONS; FLOW OF GASES; GERMANIUM; SCANNING ELECTRON MICROSCOPY;

EID: 80051904465     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3596563     Document Type: Article
Times cited : (2)

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