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Volumn 252, Issue 2, 2005, Pages 311-320
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Electron-assisted chemical etching of oxidized chromium
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Author keywords
Chromium etching; Electron beam; Scanning electron microscopy
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CHLORINE;
CHROMIUM;
ELECTRON BEAMS;
ENERGY DISPERSIVE SPECTROSCOPY;
GOLD;
OXIDATION;
PALLADIUM;
SCANNING ELECTRON MICROSCOPY;
THIN FILMS;
CHROMIUM ETCHING;
HIGH VACUUM SYSTEMS;
MODEL SUBSTRATES;
ETCHING;
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EID: 24644434399
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2004.11.090 Document Type: Article |
Times cited : (4)
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References (15)
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