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Volumn 252, Issue 2, 2005, Pages 311-320

Electron-assisted chemical etching of oxidized chromium

Author keywords

Chromium etching; Electron beam; Scanning electron microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHLORINE; CHROMIUM; ELECTRON BEAMS; ENERGY DISPERSIVE SPECTROSCOPY; GOLD; OXIDATION; PALLADIUM; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

EID: 24644434399     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.11.090     Document Type: Article
Times cited : (4)

References (15)
  • 6
    • 0036378866 scopus 로고    scopus 로고
    • Emerging lithographic technologies VI, Santa Clara
    • T. Liang, and A. Stivers Emerging lithographic technologies VI, Santa Clara Proc. SPIE - Int. Soc. Opt. Eng. 4688 2002 375
    • (2002) Proc. SPIE - Int. Soc. Opt. Eng. , vol.4688 , pp. 375
    • Liang, T.1    Stivers, A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.