Surface micromachined MEMS accelerometers on flexible polyimide substrate

IEEE Sensors Journal

Volumn 11, Issue 10, 2011, Pages 2318-2326

  Gönenli, Ismail E ^a   Çelik Butler, Zeynep ^a   Butler, Donald P ^a  

^a University of Texas at Arlington   (United States)

Author keywords

Flexible electronics; LIGA; MEMS accelerometers; smart skin; structural health monitoring

Indexed keywords

CAPACITIVE ACCELEROMETERS; FLEXIBLE POLYIMIDE SUBSTRATE; LIGA; MEMS ACCELEROMETERS; NI ELECTROPLATING; PROOF MASS; SMART SKIN; STRUCTURAL HEALTH; SURFACE MICROMACHINED MEMS; UV LIGA;

ACCELEROMETERS; MICROMACHINING; POLYIMIDES; STRUCTURAL HEALTH MONITORING; SUBSTRATES;

FLEXIBLE ELECTRONICS;

EID: 80051739194     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2136376     Document Type: Article

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