A low-noise low-offset capacitive sensing amplifier for a 50-μg/√hz monolithic CMOS MEMS accelerometer

IEEE Journal of Solid-State Circuits

Volumn 39, Issue 5, 2004, Pages 722-730

  Wu, Jiangfeng ^a,b   Feeder, Gary K ^a   Carley, L Richard ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b BROADCOM CORPORATION   (United States)

Author keywords

Accelerometer; Capacitive sensing amplifier; Chopper stabilization; Microelectromechanical systems (MEMS)

Indexed keywords

ACCELEROMETERS; AMPLIFIERS (ELECTRONIC); CAPACITANCE; ELECTRIC IMPEDANCE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SPURIOUS SIGNAL NOISE;

CAPACITANCE MATCHING; CAPACITIVE SENSING AMPLIFIERS; CHOPPER STABILIZATION;

CMOS INTEGRATED CIRCUITS;

EID: 2442513540     PISSN: 00189200     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSSC.2004.826329     Document Type: Article

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