Development of a novel two axis piezoresistive micro accelerometer based on silicon

Sensor Letters

Volumn 6, Issue 1, 2008, Pages 149-158

  Xue, Chenyang ^a   Chen, Shang ^a   Qiao, Hui ^a   Zhang, Wendong ^a   Xiong, Jijun ^a   Zhang, Binzhen ^a   Zhang, Guojun ^a  

^a NORTH UNIVERSITY OF CHINA   (China)

Author keywords

High sensitivity; MEMS; Piezoresistive; Two axis accelerometer

Indexed keywords

ACCELEROMETERS; BRIDGE CIRCUITS; COMPUTER SIMULATION; DATA STORAGE EQUIPMENT; FINITE ELEMENT METHOD; MEMS; MICROELECTROMECHANICAL DEVICES; PLASTICS FORMING; PLASTICS MOLDING; RESONANCE; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

ANALYTICAL MODELS; FINITE ELEMENT MODELLING; FINITE ELEMENT SIMULATIONS; HIGH SENSITIVITY; MECHANICAL BEHAVIOURS; MEMS TECHNOLOGIES; MICRO ACCELEROMETERS; OF SENSORS; PIEZORESISTIVE; PIEZORESISTIVE DETECTIONS; PIEZORESISTORS; PLASTIC MOLDINGS; RESONANCE FREQUENCIES; SILICON ON INSULATORS; TEST RESULTS; TWO AXIS ACCELEROMETER; TWO COMPONENTS; WHEATSTONE BRIDGES;

FREQUENCY RESPONSE;

EID: 55949131394     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2008.022     Document Type: Conference Paper

References (23)

1. Q.-M. Wang, Z. Yang, F. Li, and P. Smolinski, Sens. Actuators A 113, 1 (2004).
2. I. Lee, G. H. Yoon, J. Park, S. Seok, K. Chun, and K.-I. Lee, Sens. Actuators A 119, 8 (2005).
3. Z. Wang and Y. Xu, Sensor Letters 5, 2 (2007).
4. J. A. Plaza, C. Dominguez, J. Esteve, I. Salinas, J. Garcia, and J. Berganzo, J. Microelectromech. Syst. 13, 2 (2004).
5. R. Amarsinghe, D. V. Dao, T. Toriyama, and S. Sugiyama, MEMS2005 Conference (2005), pp. 351-354.
6. J. H. Sim, D. K. Kim, Y. H. Bae, K. H. Nam, and J. H. Lee, Electron. Lett. 34, 5 (1998).
7. N. Yazdi, F. Ayazi, and K. Najafi, Proceeding of the IEEE 86, 8 (1998).
8. P. W. Barth, F. Pourahmadi, R. Mayer, J. Poydock, and K. Peterson, Technical Digest of IEEE Solid State Sensor and Actuator Workshop, USA, June (1998).
9. H. Sandmaier, K. Kuhl, and E. Obermeier, Technical Digest of the 4th Intl. Conf. Solid State Sensors and Actuators (Transducer87), Japan (1987).
10. H. Chen, S. Shen, and M. Ban, Sens. Actuators, A 58, 197 (1997).
11. A. D. Cheok, K. G. Kumar, and S. Prince, Proceedings of the 6th International Symposium on Wearable Computers, IEEE (2002).
12. S. Sahli and D. M. Aslam, Sens. Actuators A 71, 193 (1998).
13. M. K. Lim, H. Du, C. Su, and W. L. Jin, Microelectronic Engineering 49, 263 (1999).
14. R. P. van Kampen and R. F. Wolffenbuttel, Sens. Actuators A 64, 137 (1998).
15. P. J. French and A. G. R. Evans, Solid-State Electron. 32, 1 ( 1989).
16. C. S. Smith, Phys. Rev. 94, 42 (1954).
17. R. Amarasinghe, D. V. Dao, T. Toriyama, and S. Sugiyama, Sens. Actuators A 134, 310 (2007).
18. T. Toriyama and S. Sugiyama, J. Microelectromech. Syst. 11, 5 ( 2002).
19. W. Gopel, J. Hesse, and J. N. Zemel (eds.), Sensors. A comprehensive survey, Mechanical Sensors, VCH, Weinheim (1994), Vol. 7.
20. Y. Kanda, IEEE Trans. Electron Devices ED-29 (1) (January) ( 1982).
21. C. S. Smith, Phys. Rev. 94, 1 (1954).
22. D. Creseini, D. Marioli, A. Taroni, Sens. Actuators A 55, 79 ( 1996).
23. A. Umeda and A. Ueda, Sensors and Actuators 285, A21 (1990).