MEMS sensing and control: An aerospace perspective

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3990, Issue , 2000, Pages 22-27

  Schoess, Jeffrey N ^a   Arch, David ^a   Yang, Wei ^a   Cabuz, Cleopatra ^a   Hocker, Ben ^a   Johnson, Burgess ^a   Wilson, Mark ^a  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC EMISSIONS; AERODYNAMICS; AEROSPACE APPLICATIONS; MICROSENSORS; OPTICAL SENSORS; OPTOELECTRONIC DEVICES; SILICON SENSORS; VACUUM APPLICATIONS;

CONDITION-BASED MAINTENANCE; VACUUM-ENCAPSULATED MICROBEAM;

MICROELECTROMECHANICAL DEVICES;

EID: 0033692331     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)