Fabrication and characterization of a piezoelectric accelerometer

Journal of Micromechanics and Microengineering

Volumn 9, Issue 2, 1999, Pages 123-126

  De Reus, Roger ^a   Gulløv, Jens Ole ^b   Scheeper, Patrick R ^b  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b Bruel & Kjaer Danmark   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CHEMICAL VAPOR DEPOSITION; ENCAPSULATION; FABRICATION; MICROELECTRODES; MICROMACHINING; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; ZINC OXIDE;

CHARGE SENSITIVITY; DIRECTION SELECTIVITY; PIEZOELECTRIC ACCELEROMETERS;

ACCELEROMETERS;

EID: 0033138340     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/2/005     Document Type: Article

References (7)

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