Fabrication methods for creating flexible polymer substrate sensor tags

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 3104-3108

  Ho, Harvey ^a   Skinner, Jack L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURVED SURFACES; ELECTRICAL IMPEDANCE; ENVIRONMENTAL CONDITIONS; FABRICATION METHOD; FLEXIBLE POLYMER SUBSTRATES; FLEXIBLE SENSOR; FORM FACTORS; INTEGRATED ANTENNAS; LIGHT LEVEL; MICROFABRICATED ANTENNAS; MICROWAVE ENERGIES; NETWORK ANALYZER; PASSBANDS; PASSIVE WIRELESS SENSORS; REFLECTED ENERGY; SA WFILTER; SENSOR TAG; SIMULTANEOUS OPERATION; SURFACE ACOUSTIC WAVE FILTERS; TUNGSTEN LAMPS;

ACOUSTIC IMPEDANCE; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVES; ACOUSTICS; ANTENNAS; APPROXIMATION THEORY; ELECTRIC IMPEDANCE; ELECTRIC IMPEDANCE MEASUREMENT; ELECTRIC NETWORK ANALYSIS; FABRICATION; INCANDESCENT LAMPS; MICROWAVE ANTENNAS; PASSIVE FILTERS; POLYETHYLENE TEREPHTHALATES; POLYIMIDES; SUBSTRATES; SURFACE TESTING; THERMOPLASTICS; TUNGSTEN; WIRELESS NETWORKS;

SENSORS;

EID: 72849132434     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3258142     Document Type: Conference Paper

References (10)

1. B. Warneke, B. Atwood, and K. S. J. Pister, Proceedings of the 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001), 2001 (unpublished), pp. 357-360.
2. A. Kansal, J. Hsu, S. Zahedi, and M. B. Srivastava, Trans. Embedded Comput. Sys. 6, 32 (2007).
3. U. Wolff, F. Schmidt, G. Scholl, and V. Magori, Ultrasonics Symposium, New York, NY, 1996 (unpublished), pp. 359-362.
4. L. Reindl, G. Scholl, T. Ostertag, H. Scherr, U. Wolff, and F. Schmidt, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 45, 1281 (1998).
5. A. Pohl, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 47, 317 (2000).
6. A. Pohl and F. Seifert, IEEE Proceedings of the Instrumentation and Measurement Technology Conference, 1996 (unpublished), Vol. 2, pp. 1465-1468.
7. A. Pohl, G. Ostermayer, L. Reindl, and F. Seifert, IEEE Proceedings of the Ultrasonics Symposium, 1997 (unpublished), Vol. 1, pp. 471-474.
8. S. A. Stauth and B. A. Parviz, Proc. Natl. Acad. Sci. U.S.A. 103, 13922 (2006).
9. S. A. Stauth and B. A. Parviz, Proceedings of the 2005 International Conference on MEMS, NANO and Smart Systems, 2005 (unpublished), pp. 147-152.
10. G. Scholl, C. Korden, E. Riha, C. C. W. Ruppel, U. Wolff, G. Riha, L. Reindl, and R. Weigel, IEEE Microw. Mag. 4, 68 (2003).