Design, fabrication and analysis of micromachined high sensitivity and 0% cross-axis sensitivity capacitive accelerometers

Microsystem Technologies

Volumn 15, Issue 12, 2009, Pages 1815-1826

  Farahani, Hamed ^a   Mills, James K ^a   Cleghorn, William L ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE ACCELEROMETERS; CAPACITIVE SENSOR; CROSS-AXIS SENSITIVITY; FABRICATION PROCESS; HIGH SENSITIVITY; INITIAL GAP; LAST DESIGN; MICROMACHINED; MULTI-USER; NON-LINEARITY; OPERATING RANGES; PARALLEL PLATES; SENSITIVITY VALUES; TRANSVERSE CONFIGURATION;

ACCELEROMETERS; FABRICATION; MICROMACHINING; SENSORS;

DESIGN;

EID: 76449120544     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0895-1     Document Type: Article

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