Development of polyimide flexible tactile sensor skin

Journal of Micromechanics and Microengineering

Volumn 13, Issue 3, 2003, Pages 359-366

  Engel, Jonathan ^a   Chen, Jack ^a   Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; HYDROGEN BONDS; MICROMACHINING; PLASTIC FILMS; POLYIMIDES; POLYMERIC MEMBRANES; SILICA; SKIN; STRAIN GAGES; SUBSTRATES;

POLYIMIDE FILMS; SENSOR SKIN; TACTILE SENSOR SKIN; THERMAL SILICON OXIDE; THIN-FILM METAL STRAIN GAGES;

BIOSENSORS;

EID: 0038353936     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/3/302     Document Type: Article

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