-
1
-
-
33847105439
-
On the solubility and diffusivity of the intrinsic point defects in germanium
-
DOI 10.1063/1.2429718
-
J. Vanhellemont, P. Spiewak, and K. Sueoka, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2429718 101, 036103 (2007), and references therein. (Pubitemid 46280951)
-
(2007)
Journal of Applied Physics
, vol.101
, Issue.3
, pp. 036103
-
-
Vanhellemont, J.1
Spiewak, P.2
Sueoka, K.3
-
2
-
-
40949115366
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.77.075208
-
C. Janke, R. Jones, S. Oberg, and P. R. Briddon, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.77.075208 77, 075208 (2008).
-
(2008)
Phys. Rev. B
, vol.77
, pp. 075208
-
-
Janke, C.1
Jones, R.2
Oberg, S.3
Briddon, P.R.4
-
3
-
-
72449168935
-
-
PRLTAO 0031-9007 10.1103/PhysRevLett.103.255501
-
H. Bracht, S. Schneider, J. N. Klug, C. Y. Liao, J. Lundsgaard Hansen, E. E. Haller, A. Nylandsted Larsen, D. Bougeard, M. Posselt, and C. Wündisch, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.103.255501 103, 255501 (2009), and references therein.
-
(2009)
Phys. Rev. Lett.
, vol.103
, pp. 255501
-
-
Bracht, H.1
Schneider, S.2
Klug, J.N.3
Liao, C.Y.4
Lundsgaard Hansen, J.5
Haller, E.E.6
Nylandsted Larsen, A.7
Bougeard, D.8
Posselt, M.9
Wündisch, C.10
-
5
-
-
0034667137
-
Self-interstitial defect in germanium
-
DOI 10.1103/PhysRevB.62.9903
-
A. J. R. da Silva, A. Janotti, A. Fazzio, R. J. Baierle, and R. Mota, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.62.9903 62, 9903 (2000). (Pubitemid 32335516)
-
(2000)
Physical Review B - Condensed Matter and Materials Physics
, vol.62
, Issue.15
, pp. 9903-9906
-
-
Da Silva, A.J.R.1
Janotti, A.2
Fazzio, A.3
Baierle, R.J.4
Mota, R.5
-
7
-
-
35548998748
-
Self-interstitial in germanium
-
DOI 10.1103/PhysRevLett.99.175502
-
A. Carvalho, R. Jones, C. Janke, J. P. Goss, P. R. Briddon, J. Coutinho, and S. Öberg, Phys Rev. Lett. 0031-9007 10.1103/PhysRevLett.99.175502 99, 175502 (2007). (Pubitemid 350015162)
-
(2007)
Physical Review Letters
, vol.99
, Issue.17
, pp. 175502
-
-
Carvalho, A.1
Jones, R.2
Janke, C.3
Goss, J.P.4
Briddon, P.R.5
Coutinho, J.6
Oberg, S.7
-
9
-
-
0000999845
-
-
JAPIAU 0021-8979 10.1063/1.369709
-
P. Ehrhart and H. Zillgen, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.369709 85, 3503 (1999).
-
(1999)
J. Appl. Phys.
, vol.85
, pp. 3503
-
-
Ehrhart, P.1
Zillgen, H.2
-
10
-
-
0034667105
-
Irradiation-induced defects in Ge studied by transient spectroscopies
-
DOI 10.1103/PhysRevB.62.10116
-
J. Fage-Pedersen, A. Nylandsted Larsen, and A. Mesli, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.62.10116 62, 10116 (2000). (Pubitemid 32332478)
-
(2000)
Physical Review B - Condensed Matter and Materials Physics
, vol.62
, Issue.15
, pp. 10116-10125
-
-
Fage-Pedersen, J.1
Nylandsted Larsen, A.2
Mesli, A.3
-
11
-
-
54949150236
-
-
APPLAB 0003-6951 10.1063/1.3002294
-
E. Hüger, U. Tietze, D. Lott, H. Bracht, D. Bougeard, E. E. Haller, and H. Schmidt, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.3002294 93, 162104 (2008).
-
(2008)
Appl. Phys. Lett.
, vol.93
, pp. 162104
-
-
Hüger, E.1
Tietze, U.2
Lott, D.3
Bracht, H.4
Bougeard, D.5
Haller, E.E.6
Schmidt, H.7
-
12
-
-
45349083980
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.77.235207
-
S. Brotzmann, H. Bracht, J. Lundsgaard Hansen, A. Nylandsted Larsen, E. Simoen, E. E. Haller, J. S. Christensen, and P. Werner, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.77.235207 77, 235207 (2008).
-
(2008)
Phys. Rev. B
, vol.77
, pp. 235207
-
-
Brotzmann, S.1
Bracht, H.2
Lundsgaard Hansen, J.3
Nylandsted Larsen, A.4
Simoen, E.5
Haller, E.E.6
Christensen, J.S.7
Werner, P.8
-
13
-
-
78651275993
-
-
APPLAB 0003-6951 10.1063/1.3534791
-
S. Schneider and H. Bracht, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.3534791 98, 014101 (2011).
-
(2011)
Appl. Phys. Lett.
, vol.98
, pp. 014101
-
-
Schneider, S.1
Bracht, H.2
-
14
-
-
34047155037
-
Regrowth-related defect formation and evolution in 1 MeV amorphized (001) Ge
-
DOI 10.1063/1.2717538
-
D. P. Hickey, Z. L. Bryan, K. S. Jones, R. G. Elliman, and E. E. Haller, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2717538 90, 132114 (2007). (Pubitemid 46516870)
-
(2007)
Applied Physics Letters
, vol.90
, Issue.13
, pp. 132114
-
-
Hickey, D.P.1
Bryan, Z.L.2
Jones, K.S.3
Elliman, R.G.4
Haller, E.E.5
-
15
-
-
67650236709
-
-
JAPIAU 0021-8979 10.1063/1.3153985
-
S. Koffel, N. Cherkashin, F. Houdellier, M. J. Hytch, G. Benassayag, P. Scheiblin, and A. Claverie, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.3153985 105, 126110 (2009).
-
(2009)
J. Appl. Phys.
, vol.105
, pp. 126110
-
-
Koffel, S.1
Cherkashin, N.2
Houdellier, F.3
Hytch, M.J.4
Benassayag, G.5
Scheiblin, P.6
Claverie, A.7
-
16
-
-
77952968784
-
-
APPLAB 0003-6951 10.1063/1.3429084
-
E. Napolitani, G. Bisognin, E. Bruno, M. Mastromatteo, G. G. Scapellato, S. Boninelli, D. De Salvador, S. Mirabella, C. Spinella, A. Carnera, and F. Priolo, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.3429084 96, 201906 (2010).
-
(2010)
Appl. Phys. Lett.
, vol.96
, pp. 201906
-
-
Napolitani, E.1
Bisognin, G.2
Bruno, E.3
Mastromatteo, M.4
Scapellato, G.G.5
Boninelli, S.6
De Salvador, D.7
Mirabella, S.8
Spinella, C.9
Carnera, A.10
Priolo, F.11
-
17
-
-
33845211230
-
Atomic transport in germanium and the mechanism of arsenic diffusion
-
DOI 10.1016/j.mssp.2006.08.041, PII S1369800106001843
-
H. Bracht and S. Brotzmann, Mater. Sci. Semicond. Process. 1369-8001 10.1016/j.mssp.2006.08.041 9, 471 (2006), and references therein. (Pubitemid 44856342)
-
(2006)
Materials Science in Semiconductor Processing
, vol.9
, Issue.4-5 SPEC. ISS.
, pp. 471-476
-
-
Bracht, H.1
Brotzmann, S.2
-
18
-
-
35648980012
-
Carbon, dopant, and vacancy interactions in germanium
-
DOI 10.1063/1.2798875
-
A. Chroneos, P. B. Uberuaga, and R. W. Grimes, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2798875 102, 083707 (2007). (Pubitemid 350025658)
-
(2007)
Journal of Applied Physics
, vol.102
, Issue.8
, pp. 083707
-
-
Chroneos, A.1
Uberuaga, B.P.2
Grimes, R.W.3
-
19
-
-
69549136881
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.80.033204
-
E. Bruno, S. Mirabella, G. G. Scapellato, G. Impellizzeri, A. Terrasi, F. Priolo, E. Napolitani, D. De Salvador, M. Mastromatteo, and A. Carnera, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.80.033204 80, 033204 (2009).
-
(2009)
Phys. Rev. B
, vol.80
, pp. 033204
-
-
Bruno, E.1
Mirabella, S.2
Scapellato, G.G.3
Impellizzeri, G.4
Terrasi, A.5
Priolo, F.6
Napolitani, E.7
De Salvador, D.8
Mastromatteo, M.9
Carnera, A.10
-
20
-
-
0000778916
-
-
PRLTAO 0031-9007 10.1103/PhysRevLett.65.2434
-
N. E. B. Cowern, K. T. F. Janssen, G. F. A. van de Walle, and D. J. Gravesteijn, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.65.2434 65, 2434 (1990).
-
(1990)
Phys. Rev. Lett.
, vol.65
, pp. 2434
-
-
Cowern, N.E.B.1
Janssen, K.T.F.2
Van De Walle, G.F.A.3
Gravesteijn, D.J.4
-
21
-
-
0005346036
-
-
JAPIAU 0021-8979 10.1063/1.364452
-
P. A. Stolk, H. J. Gossmann, D. J. Eaglesham, D. C. Jacobson, C. S. Rafferty, G. H. Gilmer, M. JaraIz, J. M. Poate, H. S. Luftman, and T. E. Haynes, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.364452 81, 6031 (1997).
-
(1997)
J. Appl. Phys.
, vol.81
, pp. 6031
-
-
Stolk, P.A.1
Gossmann, H.J.2
Eaglesham, D.J.3
Jacobson, D.C.4
Rafferty, C.S.5
Gilmer, G.H.6
Jaraiz, M.7
Poate, J.M.8
Luftman, H.S.9
Haynes, T.E.10
-
22
-
-
4243412773
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.65.045209
-
S. Mirabella, A. Coati, D. De Salvador, E. Napolitani, A. Mattoni, G. Bisognin, M. Berti, A. Carnera, A. V. Drigo, S. Scalese, S. Pulvirenti, A. Terrasi, and F. Priolo, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.65.045209 65, 45209 (2002).
-
(2002)
Phys. Rev. B
, vol.65
, pp. 45209
-
-
Mirabella, S.1
Coati, A.2
De Salvador, D.3
Napolitani, E.4
Mattoni, A.5
Bisognin, G.6
Berti, M.7
Carnera, A.8
Drigo, A.V.9
Scalese, S.10
Pulvirenti, S.11
Terrasi, A.12
Priolo, F.13
-
23
-
-
69349106087
-
-
PRLTAO 0031-9007 10.1103/PhysRevLett.93.055901
-
E. Napolitani, D. De Salvador, R. Storti, A. Carnera, S. Mirabella, and F. Priolo, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.93.055901 93, 055901 (2004).
-
(2004)
Phys. Rev. Lett.
, vol.93
, pp. 055901
-
-
Napolitani, E.1
De Salvador, D.2
Storti, R.3
Carnera, A.4
Mirabella, S.5
Priolo, F.6
-
24
-
-
33845798494
-
Atomistic mechanism of boron diffusion in silicon
-
DOI 10.1103/PhysRevLett.97.255902
-
D. De Salvador, E. Napolitani, S. Mirabella, G. Bisognin, G. Impellizzeri, A. Carnera, and F. Priolo, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.97.255902 97, 255902 (2006). (Pubitemid 44974768)
-
(2006)
Physical Review Letters
, vol.97
, Issue.25
, pp. 255902
-
-
De Salvador, D.1
Napolitani, E.2
Mirabella, S.3
Bisognin, G.4
Impellizzeri, G.5
Carnera, A.6
Priolo, F.7
-
25
-
-
76049123024
-
-
THSFAP 0040-6090 10.1016/j.tsf.2009.09.136
-
G. Bisognin, S. Vangelista, M. Berti, G. Impellizzeri, and M. G. Grimaldi, Thin Solid Films THSFAP 0040-6090 10.1016/j.tsf.2009.09.136 518, 2326 (2010).
-
(2010)
Thin Solid Films
, vol.518
, pp. 2326
-
-
Bisognin, G.1
Vangelista, S.2
Berti, M.3
Impellizzeri, G.4
Grimaldi, M.G.5
-
26
-
-
67649790855
-
-
JAPIAU 0021-8979 10.1063/1.3041653
-
S. Koffel, P. Scheiblin, A. Claverie, and G. Benassayag, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.3041653 105, 013528 (2009).
-
(2009)
J. Appl. Phys.
, vol.105
, pp. 013528
-
-
Koffel, S.1
Scheiblin, P.2
Claverie, A.3
Benassayag, G.4
-
27
-
-
77954748547
-
-
APPLAB 0003-6951 10.1063/1.3456537
-
F. Panciera, P. F. Fazzini, M. Collet, J. Boucher, E. Bedel, and F. Cristiano, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.3456537 97, 012105 (2010).
-
(2010)
Appl. Phys. Lett.
, vol.97
, pp. 012105
-
-
Panciera, F.1
Fazzini, P.F.2
Collet, M.3
Boucher, J.4
Bedel, E.5
Cristiano, F.6
-
29
-
-
21144448385
-
Unified model of diffusion of interstitial oxygen in silicon and germanium crystals
-
DOI 10.1088/0953-8984/17/22/017, PII S0953898405986566
-
V. Gusakov, J. Phys. Cond. Matt. 0953-8984 10.1088/0953-8984/17/22/017 17, S2285 (2005). (Pubitemid 40877108)
-
(2005)
Journal of Physics Condensed Matter
, vol.17
, Issue.22
-
-
Gusakov, V.1
-
30
-
-
4243909148
-
-
0168-583X 10.1016/0168-583X(92)95571-8
-
Y. Li, J. A. Kilner, P. L. F. Hemment, A. K. Robinson, J. P. Zhang, K. J. Reeson, C. D. Marsh, and G. R. Booker, Nucl. Instr. and Meth. Phys. Res. B 0168-583X 10.1016/0168-583X(92)95571-8 64, 750 (1992).
-
(1992)
Nucl. Instr. and Meth. Phys. Res. B
, vol.64
, pp. 750
-
-
Li, Y.1
Kilner, J.A.2
Hemment, P.L.F.3
Robinson, A.K.4
Zhang, J.P.5
Reeson, K.J.6
Marsh, C.D.7
Booker, G.R.8
-
31
-
-
0025387564
-
-
0168-583X 10.1016/0168-583X(90)90738-G
-
N. M. Ravindra, T. Fink, W. Savin, T. P. Sjoreen, R. L. Pfeffer, L. G. Yerke, R. T. Lareau, J. G. Gualtieri, R. Lux, and C. Wrenn, Nucl. Instr. and Meth. Phys. Res. B 0168-583X 10.1016/0168-583X(90)90738-G 46, 409 (1990).
-
(1990)
Nucl. Instr. and Meth. Phys. Res. B
, vol.46
, pp. 409
-
-
Ravindra, N.M.1
Fink, T.2
Savin, W.3
Sjoreen, T.P.4
Pfeffer, R.L.5
Yerke, L.G.6
Lareau, R.T.7
Gualtieri, J.G.8
Lux, R.9
Wrenn, C.10
-
32
-
-
48349121198
-
-
APAMFC 0947-8396 10.1007/s00339-008-4595-y
-
T. I. Milenov, V. I. Dimov, P. M. Rafailov, and M. M. Gospodinov, Appl. Phys. A APAMFC 0947-8396 10.1007/s00339-008-4595-y 92, 643 (2008).
-
(2008)
Appl. Phys. A
, vol.92
, pp. 643
-
-
Milenov, T.I.1
Dimov, V.I.2
Rafailov, P.M.3
Gospodinov, M.M.4
-
34
-
-
74349121589
-
-
0921-4526 10.1016/j.physb.2009.08.105
-
V. P. Markevich, A. R. Peaker, S. B. Lastovskii, L. I. Murin, V. V. Litvinov, V. V. Emtsev, and L. Dobaczewski, Phys. B 0921-4526 10.1016/j.physb.2009.08.105 404, 4533 (2009).
-
(2009)
Phys. B
, vol.404
, pp. 4533
-
-
Markevich, V.P.1
Peaker, A.R.2
Lastovskii, S.B.3
Murin, L.I.4
Litvinov, V.V.5
Emtsev, V.V.6
Dobaczewski, L.7
-
35
-
-
33645155010
-
-
0921-4526 10.1016/j.physb.2005.12.030
-
O. De Gryse, P. Vanmeerbeek, J. Vanhellemont, and P. Clauws, Phys. B 0921-4526 10.1016/j.physb.2005.12.030 376-377, 113 (2006).
-
(2006)
Phys. B
, vol.376-377
, pp. 113
-
-
De Gryse, O.1
Vanmeerbeek, P.2
Vanhellemont, J.3
Clauws, P.4
-
36
-
-
5544271304
-
-
PRLTAO 0031-9007 10.1103/PhysRevLett.67.212
-
N. E. B. Cowern, G. F. A. van de Walle, D. J. Gravesteijn, C. J. Vriezema, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.67.212 67, 212 (1991).
-
(1991)
Phys. Rev. Lett.
, vol.67
, pp. 212
-
-
Cowern, N.E.B.1
Van De Walle, G.F.A.2
Gravesteijn, D.J.3
Vriezema, C.J.4
-
37
-
-
76049130192
-
-
THSFAP 0040-6090 10.1016/j.tsf.2009.09.173
-
E. Bruno, S. Mirabella, G. G. Scapellato, G. Impellizzeri, A. Terrasi, F. Priolo, E. Napolitani, D. De Salvador, M. Mastromatteo, and A. Carnera, Thin Solid Films THSFAP 0040-6090 10.1016/j.tsf.2009.09.173 518, 2386 (2010).
-
(2010)
Thin Solid Films
, vol.518
, pp. 2386
-
-
Bruno, E.1
Mirabella, S.2
Scapellato, G.G.3
Impellizzeri, G.4
Terrasi, A.5
Priolo, F.6
Napolitani, E.7
De Salvador, D.8
Mastromatteo, M.9
Carnera, A.10
-
38
-
-
4043176131
-
-
JAPIAU 0021-8979 10.1063/1.1766090
-
S. Uppal, A. F. W. Willoughby, J. M. Bonar, N. E. B. Cowern, T. Grasby, R. J. H. Morris, and M. G. Dowsett, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1766090 96, 1376 (2004).
-
(2004)
J. Appl. Phys.
, vol.96
, pp. 1376
-
-
Uppal, S.1
Willoughby, A.F.W.2
Bonar, J.M.3
Cowern, N.E.B.4
Grasby, T.5
Morris, R.J.H.6
Dowsett, M.G.7
-
39
-
-
0035498502
-
Theory of thermal Si oxide growth rate taking into account interfacial Si emission effects
-
DOI 10.1016/S0167-9317(01)00614-1, PII S0167931701006141
-
H. Kageshima, M. Uematsu, and K. Shiraishi, Microelectron. Eng. MIENEF 0167-9317 10.1016/S0167-9317(01)00614-1 59, 301 (2001). (Pubitemid 33018430)
-
(2001)
Microelectronic Engineering
, vol.59
, Issue.1-4
, pp. 301-309
-
-
Kageshima, H.1
Uematsu, M.2
Shiraishi, K.3
-
40
-
-
33747862495
-
In situ chemical and structural investigations of the oxidation of Ge(001) substrates by atomic oxygen
-
DOI 10.1063/1.2337543
-
A. Molle, Md. N. K. Bhuiyan, G. Tallarida, and M. Fanciulli, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2337543 89, 083504 (2006). (Pubitemid 44286188)
-
(2006)
Applied Physics Letters
, vol.89
, Issue.8
, pp. 083504
-
-
Molle, A.1
Bhuiyan, M.N.K.2
Tallarida, G.3
Fanciulli, M.4
-
41
-
-
77956858992
-
-
JAPIAU 0021-8979 10.1063/1.3475990
-
S. K. Wang, K. Kita, C. H. Lee, T. Tabata, T. Nishimura, K. Nagashio, and A. Toriumi, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.3475990 108, 054104 (2010).
-
(2010)
J. Appl. Phys.
, vol.108
, pp. 054104
-
-
Wang, S.K.1
Kita, K.2
Lee, C.H.3
Tabata, T.4
Nishimura, T.5
Nagashio, K.6
Toriumi, A.7
-
42
-
-
0035886241
-
-
JAPIAU 0021-8979 10.1063/1.1402664
-
S. Uppal, A. F. W. Willoughby, J. M. Bonar, A. G. R. Evans, N. E. B. Cowern, R. Morris, and M. G. Dowsett, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1402664 90, 4293 (2001).
-
(2001)
J. Appl. Phys.
, vol.90
, pp. 4293
-
-
Uppal, S.1
Willoughby, A.F.W.2
Bonar, J.M.3
Evans, A.G.R.4
Cowern, N.E.B.5
Morris, R.6
Dowsett, M.G.7
-
44
-
-
36549099791
-
-
JAPIAU 0021-8979 10.1063/1.334416
-
M. Miyake, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.334416 57, 1861 (1985).
-
(1985)
J. Appl. Phys.
, vol.57
, pp. 1861
-
-
Miyake, M.1
|