Infrared analysis of the precipitated oxide phase in silicon and germanium

Physica B: Condensed Matter

Volumn 376-377, Issue 1, 2006, Pages 113-116

  De Gryse, O ^a   Vanmeerbeek, P ^a   Vanhellemont, J ^a   Clauws, P ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

Germanium; Infrared; Oxide precipitate

Indexed keywords

ABSORPTION; GERMANIUM; GERMANIUM COMPOUNDS; HEAT TREATMENT; PRECIPITATION (CHEMICAL); THERMAL EFFECTS;

BROAD ABSORPTION BANDS; GERMANIUM OXIDE PRECIPITATES; INTERSTITIAL OXYGEN; OXIDE PRECIPITATE; PROLONGED PRECIPITATION;

SILICON;

EID: 33645155010     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2005.12.030     Document Type: Conference Paper

References (10)

1. A. Borghesi, A. Piaggi, A. Sassella, and A. Stella Phys. Rev. B 46 1992 4123
2. O. De Gryse, P. Clauws, J. Van Landuyt, O. Lebedev, C. Claeys, E. Simoen, and J. Vanhellemont J. Appl. Phys. 91 2002 2493
3. W. Kaiser, and C.D. Thurmond J. Appl. Phys. 32 1961 115
4. O. De Gryse, P. Clauws, J. Vanhellemont, O.I. Lebedev, J. Van Landuyt, E. Simoen, and C. Claeys J. Electrochem. Soc. 151 2004 G598
5. M. De Bock, Masters Thesis, Ghent University, 2002.
6. A.R. Day, and M.F. Thorpe J. Phys.: Condens. Matter 11 1999 2551
7. G.W. Milton J. Appl. Phys. 52 1981 5286
8. D.J. Bergman Phys. Rep. 43 1978 377
9. F.L. Galeener, and G. Luckovsky Phys. Rev. Lett. 37 1976 1474
10. E.I. Millett, L.S. Wood, and G. Bew Br. J. Appl. Phys. 16 1965 159