SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Physical Review B - Condensed Matter and Materials Physics

Volumn 65, Issue 4, 2002, Pages 452091-4520912

Interaction between self-interstitials and substitutional C in silicon: Interstitial trapping and C clustering mechanism

(13) Mirabella, S a Coati, A a De Salvador, D a Napolitani, E a Mattoni, A a Bisognin, G a Berti, M a Carnera, A a Drigo, A V a Scalese, S a Pulvirenti, S a Terrasi, A a Priolo, F a

a UNIVERSITY OF CATANIA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; SILICON;

ARTICLE; ATOM; CHEMICAL ANALYSIS; CHEMICAL INTERACTION; CHEMICAL REACTION; DIFFUSION; FILTER; MEMBRANE; PRECIPITATION;

EID: 4243412773 PISSN: 01631829 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (95)

References (45)

1
- 33746343244
- (1989) Rev. Mod. Phys. , vol.61 , pp. 289
- Fahey, P.M.¹ Griffin, P.B.² Plummer, J.D.³

2
- 0000778916
- (1990) Phys. Rev. Lett. , vol.65 , pp. 2434
- Cowern, N.E.B.¹ Janssen, K.T.F.² Van de Walle, G.F.A.³ Gravesteijn, D.J.⁴

3
- 5544271304
- (1991) Phys. Rev. Lett. , vol.67 , pp. 212
- Cowern, N.E.B.¹ Van de Walle, G.F.A.² Gravesteijn, D.J.³ Vriezema, C.J.⁴

4
- 0000987659
- (1994) Appl. Phys. Lett. , vol.64 , pp. 2646
- Cowern, N.E.B.¹

5
- 0000543030
- (1995) Phys. Rev. B , vol.52 , pp. 16542
- Bracht, H.¹ Stolwijk, N.A.² Mehrer, H.³

6
- 0032514072
- (1998) Phys. Rev. Lett. , vol.81 , pp. 393
- Bracht, H.¹ Haller, E.E.² Clark-Phelps, R.³

7
- 0022061598
- (1985) Appl. Phys. A: Solids Surf. , vol.37 , pp. 1
- Tan, T.Y.¹ Gösele, U.²

8
- 0001528106
- (1997) Appl. Phys. Lett. , vol.71 , pp. 3862
- Gossmann, H.-J.¹ Haynes, T.E.² Stolk, P.A.³ Jacobson, D.C.⁴ Gilmer, G.H.⁵ Poate, J.M.⁶ Luftam, H.S.⁷ Mogi, T.K.⁸ Thompson, M.O.⁹

9
- 2842521314
- (1996) Phys. Rev. B , vol.54 , pp. 4741
- Zhu, J.¹ Diaz de la Rubia, T.² Yang, L.H.³ Mailhiot, C.⁴ Gilmer, G.H.⁵

10
- 0001739179
- (1999) Phys. Rev. Lett. , vol.83 , pp. 4341
- Sadigh, B.¹ Lenosky, T.J.² Theiss, S.K.³ Caturla, M.-J.⁴ Diaz de la Rubia, T.⁵ Foad, M.A.⁶

11
- 0000065634
- (1999) Phys. Rev. Lett. , vol.83 , pp. 4345
- Windl, W.¹ Bunea, M.M.² Stumpf, R.³ Dunham, S.T.⁴ Masquelier, M.P.⁵

12
- 0005346036
- and references therein
- (1997) J. Appl. Phys. , vol.81 , pp. 6031
- Stolk, P.A.¹ Gossmann, J.H.-J.² Eaglesham, D.J.³ Jacobson, D.C.⁴ Rafferty, C.S.⁵ Gilmer, G.H.⁶ Jaraiz, M.⁷ Poate, J.M.⁸ Luftman, H.S.⁹ Haynes, T.E.¹⁰

13
- 0000978955
- (1996) Appl. Phys. Lett. , vol.69 , pp. 2113
- Chao, H.S.¹ Griffin, P.B.² Plummer, J.D.³ Rafferty, C.S.⁴

14
- 0000382472
- (1999) Appl. Phys. Lett. , vol.75 , pp. 1869
- Napolitani, E.¹ Camera, A.² Schroer, E.³ Privitera, V.⁴ Priolo, F.⁵ Moffatt, S.⁶

15
- 0001321087
- (2000) Appl. Phys. Lett. , vol.77 , pp. 112
- Saleh, H.¹ Law, M.E.² Bharatan, S.³ Jones, K.S.⁴ Krishnamoorthy, V.⁵ Buyuklimanli, T.⁶

16
- 36449001067
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1370
- Stolk, P.A.¹ Eaglesham, D.J.² Gossmann, H.-J.³ Poate, J.M.⁴

17
- 0021473278
- (1984) Appl. Phys. Lett. , vol.45 , pp. 268
- Kalejs, J.P.¹ Ladd, L.A.² Gösele, U.³

18
- 0000380222
- (1998) Appl. Phys. Lett. , vol.73 , pp. 2465
- Werner, P.¹ Gossmann, H.² Jacobson, D.C.³ Gösele, U.⁴

19
- 0001759052
- (1999) Appl. Phys. Lett. , vol.74 , pp. 392
- Scholz, R.F.¹ Werner, P.² Gösele, U.³ Tan, T.Y.⁴

20
- 3743153340
- (1976) Phys. Rev. Lett. , vol.36 , pp. 1329
- Watkins, G.D.¹ Brower, K.L.²

21
- 0001666794
- (1998) Appl. Phys. Lett. , vol.72 , pp. 200
- Scholz, R.¹ Gösele, U.² Huh, J.-Y.³ Tan, T.Y.⁴

22
- 0000077773
- (1998) Appl. Phys. Lett. , vol.73 , pp. 1682
- Rücker, H.¹ Heinemann, B.² Röpke, W.³ Kurps, R.⁴ Krüger, D.⁵ Lippert, G.⁶ Osten, H.J.⁷

23
- 0000301643
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1150
- Cowern, N.E.B.¹ Cacciato, A.² Custer, J.S.³ Saris, F.W.⁴ Vandervorst, W.⁵

24
- 0038795297
- (1999) Appl. Phys. Lett. , vol.74 , pp. 3377
- Rücker, H.¹ Heinemann, B.² Bolze, D.³ Kurps, R.⁴ Krüger, D.⁵ Lippert, G.⁶ Osten, H.J.⁷

25
- 0001715621
- (1998) Appl. Phys. Lett. , vol.73 , pp. 3695
- Carroll, M.S.¹ Chang, C.-L.² Sturm, J.C.³ Büyüklimanli, T.⁴

26
- 0035905289
- (2001) Appl. Phys. Lett. , vol.79 , pp. 4145
- Napolitani, E.¹ Coati, A.² De Salvador, P.³ Carnera, A.⁴ Mirabella, S.⁵ Scalese, S.⁶ Priolo, F.⁷

27
- 16444376728
- (1994) J. Appl. Phys. , vol.76 , pp. 3656
- Strane, J.W.¹ Stein, H.J.² Lee, S.R.³ Picraux, S.T.⁴ Watanabe, J.K.⁵ Mayer, J.W.⁶

28
- 0000406804
- (1995) J. Appl. Phys. , vol.77 , pp. 1934
- Fischer, G.G.¹ Zaumseil, P.² Bugiel, E.³ Osten, H.J.⁴

29
- 33744564867
- edited by K. Jones et al., Mater. Res. Soc. Symp. Proc. No. 669 (Materials Research Society, Warrendale)
- (2001) Si Front-End Processing-Physics and Technology of Dopant-Defect Interactions III
- De Salvador, D.¹ Napolitani, E.² Coati, A.³ Berti, M.⁴ Drigo, A.V.⁵ Carroll, M.S.⁶ Sturm, J.C.⁷ Stangl, J.⁸ Bauer, G.⁹ Lazzarini, L.¹⁰

30
- 0000238980
- (1990) Phys. Rev. B , vol.42 , pp. 5765
- Song, L.W.¹ Zhan, X.D.² Benson, B.W.³ Watkins, G.D.⁴

31
- 0035881374
- (2001) J. Appl. Phys. , vol.90 , pp. 1768
- Ngau, J.L.¹ Griffin, P.B.² Plummer, J.D.³

32
- 0001605596
- (1998) Appl. Phys. Lett. , vol.72 , pp. 3011
- Priolo, F.¹ Mannino, G.² Micciché, M.³ Privitera, V.⁴ Napolitani, E.⁵ Carnera, A.⁶

33
- 0001226049
- (1998) Appl. Phys. Lett. , vol.72 , pp. 1602
- Berti, M.¹ De Salvador, D.² Drigo, A.V.³ Romanato, F.⁴ Stangl, J.⁵ Zerlauth, S.⁶ Schäffler, F.⁷ Bauer, G.⁸

34
- 18244375862
- (2000) Phys. Rev. B , vol.61 , pp. 13005
- De Salvador, D.¹ Petrovich, M.² Berti, M.³ Romanato, F.⁴ Napolitani, E.⁵ Drigo, A.V.⁶ Stangl, J.⁷ Zerlauth, S.⁸ Muhlberger, M.⁹ Schaffler, F.¹⁰ Bauer, G.¹¹

35
- 36549100507
- (1987) J. Appl. Phys. , vol.62 , pp. 4154
- Fewster, P.F.¹ Curling, C.²

36
- 0002734525
- edited by F. F. Y. Wang (North-Holland, Amsterdam)
- (1981) Impurity Doping Processes in Si , pp. 315
- Fair, R.B.¹

37
- 4243941082
- (1990) Phys. Rev. Lett. , vol.64 , pp. 1757
- Tersoff, J.¹

38
- 33744639148
- note

39
- 33746330680
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2302
- Lim, D.R.¹ Rafferty, C.S.² Clemens, F.P.³

40
- 0000426452
- (2000) Appl. Phys. Lett. , vol.77 , pp. 1976
- Haddara, Y.¹ Folmer, B.T.² Law, M.E.³ Buyuklimanli, T.⁴

41
- 0022439842
- (1986) Appl. Phys. A: Solids Surf. , vol.39 , pp. 37
- Stolwijk, N.A.¹ Holzl, J.² Frank, W.³ Weber, E.R.⁴ Mehrer, H.⁵

42
- 0001352201
- (1986) Phys. Rev. B , vol.33 , pp. 5536
- Mantovani, S.¹ Nava, F.² Nobili, S.³ Ottaviani, G.⁴

43
- 0000235265
- (1980) Nucl. Instrum. Methods , vol.174 , pp. 257
- Biersack, J.P.¹ Haggmark, L.G.²

44
- 0001548018
- edited by S. Mahajan (North-Holland, Amsterdam)
- (1994) Handbook of Semiconductors, 2nd ed. , vol.3 , pp. 1557
- Davis, G.¹ Newman, R.C.²

45
- 33744663678
- edited by A. Agarwal et al., Mater. Res. Soc. Symp. Proc. No. 610 (Materials Research Society, Warrendale)
- (2000) Si Front-End Processing-Physics and Technology of Dopant-Defect Interactions II
- Gösele, U.¹ Laveant, P.² Scholz, R.³ Engler, N.⁴ Werner, P.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.