Room temperature migration of boron in crystalline silicon

Physical Review Letters

Volumn 93, Issue 5, 2004, Pages

  Napolitani, E ^a   De Salvador, D ^a   Storti, R ^a   Carnera, A ^a   Mirabella, S ^b   Priolo, F ^b  

^a UNIVERSITY OF PADOVA   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM-SOLID INTERACTIONS; ENERGY BARRIERS; FRENKEL PAIRS; HOPPING PROCESSES;

ACTIVATION ENERGY; AMORPHIZATION; DIFFUSION; DOPING (ADDITIVES); ION IMPLANTATION; MASS SPECTROMETRY; MOLECULAR BEAM EPITAXY; SILICON; SPUTTERING; THERMAL EFFECTS;

BORON;

EID: 69349106087     PISSN: 00319007     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevLett.93.055901     Document Type: Article

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