Surface acoustic wave velocity of gold films deposited on silicon substrates at different temperatures

Journal of Applied Physics

Volumn 110, Issue 2, 2011, Pages

  Salas, E ^a   Jimenez Rioboo R J ^a   Prieto, C ^a   Every, A G ^b  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^b UNIVERSITY OF THE WITWATERSRAND   (South Africa)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION PROPERTIES; AU THIN FILMS; CRYSTALLINITIES; DC MAGNETRON SPUTTERING; DIFFERENT SUBSTRATES; ELASTIC PROPERTIES; GOLD FILM; HIGHER TEMPERATURES; IDEAL VALUES; SI (001) SUBSTRATE; SILICON SUBSTRATES; SURFACE ACOUSTIC WAVE PROPAGATION; SURFACE ACOUSTIC WAVES;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE PROPAGATION; ACOUSTIC WAVE VELOCITY; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ATOMIC FORCE MICROSCOPY; GOLD; GOLD COATINGS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICON; THIN FILMS; X RAY DIFFRACTION;

SUBSTRATES;

EID: 79961111026     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3606412     Document Type: Article

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