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Volumn 50, Issue 2-3 SPEC. ISS., 2004, Pages 663-666
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Application of MEMS technology to micro fuel cells
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Author keywords
MEMS; Micro fuel cell; Porous silicon; Portable application
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Indexed keywords
CATALYSIS;
ELECTRIC INSULATION;
ELECTROCHEMISTRY;
ETCHING;
MICROELECTROMECHANICAL DEVICES;
POROUS SILICON;
SENSORS;
MICRO FUEL CELLS;
PORTABLE APPLICATIONS;
POWER DENSITIES;
REACTIVE ION ETCHING (RIE);
FUEL CELLS;
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EID: 9344227369
PISSN: 00134686
EISSN: None
Source Type: Journal
DOI: 10.1016/j.electacta.2004.01.092 Document Type: Conference Paper |
Times cited : (84)
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References (5)
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