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Volumn 317, Issue 1-2, 1998, Pages 198-201
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Structure and elastic properties of thin alloyed gold films
a a b c b a d |
Author keywords
Scattering; Thin films; X ray diffraction
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Indexed keywords
ACOUSTIC PROPERTIES;
BRILLOUIN SCATTERING;
DENSITY MEASUREMENT (SPECIFIC GRAVITY);
ELASTICITY;
GOLD;
MAGNETRON SPUTTERING;
METALLIC FILMS;
SILICON WAFERS;
SURFACE ROUGHNESS;
SURFACE STRUCTURE;
THICKNESS MEASUREMENT;
X RAY POWDER DIFFRACTION;
FILM DENSITY;
FILM STRUCTURE;
FILM THICKNESS;
GOLD FILM;
X RAY REFLECTIVITY;
THIN FILMS;
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EID: 0032048749
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(97)00619-6 Document Type: Article |
Times cited : (4)
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References (16)
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