Texture evolution and mechanical properties of ion-irradiated Au thin films

Acta Materialia

Volumn 57, Issue 14, 2009, Pages 4009-4021

  Dietiker, Marianne ^a   Olliges, Sven ^a   Schinhammer, Michael ^a   Seita, Matteo ^a   Spolenak, Ralph ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Electron backscattering diffraction; Ion beam processing; Microstructure; Nanoindentation; Thin films

Indexed keywords

AU THIN FILMS; DEFECT CLUSTER; ELECTRON BACKSCATTERING DIFFRACTION; FLUENCES; GEOMETRICALLY NECESSARY DISLOCATIONS; HALL-PETCH EFFECTS; HARDENING BEHAVIOR; HIGH ENERGY; INITIAL GRAIN SIZE; INTERFACIAL DEGRADATION; ION-BEAM PROCESSING; ION-INDUCED DEFECTS; MICRO DEVICES; MICROSTRUCTURE CHANGES; MICROSTRUCTURE CONTROL; SELECTIVE GRAIN GROWTH; TEXTURE EVOLUTIONS;

BACKSCATTERING; CHEMICAL MODIFICATION; DIFFRACTION; DISLOCATIONS (CRYSTALS); ELECTRON SCATTERING; FATIGUE DAMAGE; GOLD; GRAIN SIZE AND SHAPE; ION BEAMS; ION BOMBARDMENT; IONS; MECHANICAL PROPERTIES; NANOINDENTATION; TEXTURES; THIN FILMS;

GRAIN GROWTH;

EID: 67650178219     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2009.04.042     Document Type: Article

References (38)

1. Atwater H.A., Thompson C.V., and Smith H.I. J Appl Phys 64 (1988) 2337-2353
2. Dong L., and Srolovitz D.J. J Appl Phys 84 (1998) 5261-5269
3. Li J., Liu J.C., and Mayer J.W. Nucl Instrum Methods Phys Res B 36 (1989) 306-311
4. Park S.J., Norton D.P., and Selvamanickam V. Appl Phys Lett 87 (2005) 031907
5. Spolenak R., Sauter L., and Eberl C. Scripta Mater 53 (2005) 1291-1296
6. Olliges S., Gruber P., Bardill A., Ehrler D., Carstanjen H.D., and Spolenak R. Acta Mater 54 (2006) 5393-5399
7. Ruhle M. Phys Status Solidi 26 (1968) 661-670
8. Zinkle S.J., and Oliver W.C. J Nucl Mater 141 (1986) 548-552
9. Okada A., Yoshiie T., Kojima S., and Kiritani M. J Nucl Mater 141 (1986) 907-910
10. Plantz D.H., Wang L.M., Dodd R.A., and Kulcinski G.L. Metall Mater Trans A 20 (1989) 2681-2687
11. Hunn J.D., Lee E.H., Byun T.S., and Mansur L.K. J Nucl Mater 282 (2000) 131-136
12. Victoria M., Baluc N., Bailat C., Dai Y., Luppo M.I., Schaublin R., and Singh B.N. J Nucl Mater 276 (2000) 114-122
13. Essmann U., and Wilkens M. Phys Status Solidi 4 (1964) K53-K56
14. Kiritani M., et al. J Nucl Mater 179 (1991) 1104-1107
15. Lucas G.E. J Nucl Mater 206 (1993) 287-305
16. Robach J.S., Robertson I.M., Wirth B.D., and Arsenlis A. Philos Mag 83 (2003) 955-967
17. Gemmell D.S. Rev Mod Phys 46 (1974) 129-227
18. Dos Santos e Lucato SL. Lince V 2.31: TU Darmstadt. FB Materials Science, Ceramics Group; 1998.
19. Oliver W.C., and Pharr G.M. J Mater Res 7 (1992) 1564-1583
20. Shimomura Y., Fukushima H., Kami M., Yoshiie T., Yoshida H., and Kiritani M. J Nucl Mater 141 (1986) 846-850
21. Kiritani M., Yoshiie T., and Kojima S. J Nucl Mater 141 (1986) 625-632
22. Okada A., Yoshiie T., Kojima S., Abe K., and Kiritani M. J Nucl Mater 133 (1985) 321-325
23. Ziegler JF, Biersack JP, Littmark U. The stopping and ranges of ions in solids. New York: Pergamon Press; 1985.
24. Liu J.C., Li J., and Mayer J.W. J Appl Phys 67 (1990) 2354-2358
25. Spolenak R., et al. Mater Res Soc Symp Proc 612 (2001) 1-7
26. Thompson C.V., and Carel R. J Mech Phys Solids 44 (1996) 657-673
27. Thompson C.V. Annu Rev Mater Sci 30 (2000) 159-190
28. Zinkle S.J., and Kulcinski G.L. J Nucl Mater 122 (1984) 449-454
29. Iwase A., Rehn L.E., Baldo P.M., and Funk L. J Nucl Mater 238 (1996) 224-236
30. Cao Y., Nankivil D.D., Allameh S., and Soboyejo W.O. Mater Manuf Process 22 (2007) 187-194
31. Tayebi N., Polycarpou A.A., and Conry T.F. J Mater Res 19 (2004) 1791-1802
32. Jungk J.M., et al. J Mater Res 19 (2004) 2812-2821
33. Cordill M.J., Hallman D.M., Moody N.R., Adams D.P., and Gerberich W.W. Metall Mater Trans A 38A (2007) 2154-2159
34. Tabor D. The hardness of metals (1951), Clarendon Press, Oxford
35. Sakai S., Tanimoto H., and Mizubayashi H. Acta Mater 47 (1998) 211-217
36. Cao Y.F., Zong Z., and Soboyejo W. Mater Res Soc Symp Proc 875 (2005) 189-194
37. Courtney T.H. Mechanical behavior of materials, McGraw-Hill series in materials science (2000), McGraw-Hill, Boston, (MA) p. 193
38. Knorr D.B., Tracy D.P., and Rodbell K.P. Appl Phys Lett 59 (1991) 3241-3243