Combinatorial studies for determining properties of thin-film gold-cobalt alloys

Applied Physics Letters

Volumn 85, Issue 22, 2004, Pages 5215-5217

  Ramirez, Ainissa G ^a,b   Saha, Ranjana ^a,b  

^a Yale University   (United States)

^b APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMBINATORIAL STUDIES; GOLD-COBALT ALLOYS; MICRORELAYS; SHEET RESISTANCE;

COBALT ALLOYS; COMPOSITION; HARDNESS; HEAT TREATMENT; PRECIPITATION (CHEMICAL); SYNTHESIS (CHEMICAL); THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

GOLD ALLOYS;

EID: 11044238618     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1829386     Document Type: Article

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