MEAM molecular dynamics study of a gold thin film on a silicon substrate

Surface Science

Volumn 551, Issue 1-2, 2004, Pages 39-58

  Kuo, Chin Lung ^a   Clancy, Paulette ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

Computer simulations; Gold; Metal semiconductor interfaces; Molecular dynamics; Semi empirical models and model calculations; Silicides; Silicon; Surface diffusion

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; BINDING ENERGY; COMPUTER SIMULATION; CRYSTALLINE MATERIALS; DENSITY (SPECIFIC GRAVITY); DIFFUSION; INTERFACES (MATERIALS); LOW ENERGY ELECTRON DIFFRACTION; MOLECULAR DYNAMICS; SEMICONDUCTING SILICON COMPOUNDS; THERMAL EFFECTS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

METAL-SEMICONDUCTOR INTERFACES; MODEL CALCULATIONS; SEMI-EMPIRICAL MODELS; SILICIDES;

GOLD COMPOUNDS;

EID: 0842308300     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2003.12.043     Document Type: Article

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