Stress and grain growth in thin films

Journal of the Mechanics and Physics of Solids

Volumn 44, Issue 5, 1996, Pages 657-673

  Thompson, Carl V ^a   Carel, Roland ^a  

^a USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; ELASTICITY; FILM GROWTH; GRAIN GROWTH; GRAIN SIZE AND SHAPE; MECHANICAL PROPERTIES; MICROSTRUCTURE; POLYCRYSTALLINE MATERIALS; STRESS RELIEF; STRESSES;

ANISOTROPIC MATERIALS; FILM FORMATION; POST DEPOSITION ANNEALING;

THIN FILMS;

EID: 0030147755     PISSN: 00225096     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-5096(96)00022-1     Document Type: Article

References (45)

1. Abermann, R. (1990) Vacuum 41, 1279.
2. Abermann, R. (1992) Mater. Res. Soc. Symp. Proc. 239, 25.
3. Abermann, R. and Koch, R. (1985) Thin Solid Films 129, 71.
4. Abermann, R., Kramer, R. and Maser, J. (1978) Thin Solid Films 52, 215.
5. Atkinson, H. V. (1988) Acta Metall. 36, 469.
6. Beck, P. A., Kremer, J. C., Dember, L. J. and Holzworth, M. L. (1948) Am. Inst. Min. (Metall.) Engng 75, 372.
7. Carel, R., Thompson, C. V. and Frost, H. J. (1994) Mater. Res. Soc. Symp. Proc. 343, 49.
8. Carel, R. and Thompson, C. V. (1995) Ph.D. Thesis, Department of Materials Science and Engineering, Massachusetts Institute of Technology.
9. Chaudhari. (1971) J. Vac. Sci. Tech. 9, 520.
10. d'Heurle, F. M. (1970) Metall. Trans. 1, 725.
11. Doerner, M. F. and Nix, W. D. (1988) CRC Critical Rev. in Sol. State and Mater. Sci. 14, 225.
12. Floro, J. A., Thompson, C. V., Carel, R. and Bristowe, P. D. (1994) J. Mater. Res. 9, 94.
13. Frost, H. J., Hayashi, Y., Thompson, C. V. and Walton, D. T. (1994) Mater. Res. Soc. Symp. Proc. 317, 431.
14. Frost, H. J., Spaepen, F. and Ashby, M. F. (1982) Scripta Metall. 16, 1165.
15. Frost, H. J., Thompson, C. V., Howe, C. L. and Whang, J. (1988) Scripta Metall. 22, 65.
16. Frost, H. J., Thompson, C. V. and Walton, D. T. (1990) Acta Metall. Mater. 38, 1455.
17. Frost, H. J., Thompson, C. V. and Walton, D. T. (1992) Acta Metall. 40, 779.
18. Gangulee, Q. A. and d'Heurle, F. M. (1972) Thin Solid Films 12, 399.
19. Grovenor, C. R. M., Hentzell, H. T. G. and Smith, D. A. (1984) Acta Metall. 32, 773.
20. Hayashi, Y., Frost, H. J., Thompson, C. V. and Walton, D. T. (1994) Mater. Res. Soc. Symp. Proc. 317, 485.
21. Hoffman, D. W. (1976) Thin Solid Films 34, 185.
22. Hoffman, D. W. and Thorton, J. A. (1982) J. Vac. Sci. Tech. 20, 355.
23. Lloyd, J. R. and Smith, P. M. (1983) J. Vac. Sci. Technol. A1, 455.
24. Longworth, H. P. and Thompson, C. V. (1991) J. Appl. Phys. 69, 3929-3940.
25. Mouchan, B. A. and Demichisin, A. V. (1969) Fiz. Met. 28, 83.
26. Mullins, W. W. Acta Metall. 6, 414 (1958).
27. Murikami, M. and Chaudhari, P. (1977) Thin Solid Films 46, 109.
28. Nix, W. D. (1989) Met. Trans. 20A, 2217.
29. Nix, W. D. (1994) Private communication.
30. Ohring, M. (1992) The Materials Science of Thin Films, Ch. 9. Academic Press, Boston.
31. Palmer, J. E., Thompson, C. V. and Smith, H. I. (1987) J. Appl. Phys. 62, 2494.
32. Sanchez, J. E. and Artz, E. (1992) Scripta Metall. Mater. 27, 285.
33. Thompson, C. V. (1985) J. Appl. Phys. 58, 763.
34. Thompson, C. V. (1990) Ann. Rev. Mater. Sci. 20, 245.
35. Thompson, C. V. (1992) Proceedings of the International Conference on Grain Growth in Polycrystalline Materials, Trans. Tech. Publications, Pt. I, 245.
36. Thompson, C. V. (1993a) J. Mater. Res. 8, 237.
37. Thompson, C. V. (1993b) Scripta Metall. Mater. 28, 167.
38. Thompson, C. V. and Carel, R. (1995a) J Mater. Sci. Engng 32B, 211.
39. Thompson, C. V. and Carel, R. (1995b) to be published in the Proceedings of the 2nd International Conf. on Grain Growth, Kitakyushu, Japan.
40. Thompson, C. V., Floro, J., Smith, H. J. (1990) J. Appl. Phys. 67, 4099.
41. Thornton, J. A. (1977) Ann. Rev. Mater. Sci. 7, 239.
42. Tracy, Davies, P. W., Fanger, D. and Gartman, P. (1988) Microstructural Science for Thin Film Metallizations in Electronic Applications pp. 157-167 TMS.
43. Venkatraman, R. and Bravman, J. C. (1992) J. Mater. Res. 7, 2040.
44. Wong, C. C., Smith, H. I. and Thompson, C. V. (1986) Appl. Phys. Lett. 48, 335.
45. Wu, K., Baerg, W. and Jupiter, P. (1991) Appl. Phys. Lett. 58, 1299-1301.