메뉴 건너뛰기




Volumn 5, Issue 7, 2011, Pages 5532-5542

Symmetry in strain engineering of nanomembranes: Making new strained materials

Author keywords

elastic relaxation; epitaxy; heterostructures; nanomembranes; strain sharing; thin films

Indexed keywords

BULK MATERIALS; ELASTIC RELAXATION; ELASTIC STRAIN; EXTENDED DEFECT; ISOTROPIC AND ANISOTROPIC MATERIALS; MATERIAL CHANGE; NANOMEMBRANES; SI(110); SINGLE-CRYSTAL MATERIALS; STRAIN DISTRIBUTIONS; STRAIN ENGINEERING; SYMMETRIC SYSTEMS; TRILAYERS; TUNABILITIES;

EID: 79961057474     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn2009672     Document Type: Conference Paper
Times cited : (18)

References (53)
  • 1
    • 34249948925 scopus 로고    scopus 로고
    • Physics of Strain Effects in Semiconductors and Metal-Oxide-Semiconductor Field-Effect Transistors
    • Sun, Y.; Thompson, S. E.; Nishida, T. Physics of Strain Effects in Semiconductors and Metal-Oxide-Semiconductor Field-Effect Transistors J. Appl. Phys. 2007, 101, 104503
    • (2007) J. Appl. Phys. , vol.101 , pp. 104503
    • Sun, Y.1    Thompson, S.E.2    Nishida, T.3
  • 2
    • 0043269756 scopus 로고    scopus 로고
    • Six-Band K•P Calculation of the Hole Mobility in Silicon Inversion Layers: Dependence on Surface Orientation, Strain, and Silicon Thickness
    • Fischetti, M. V.; Ren, Z.; Solomon, P. M.; Yang, M.; Rim, K. Six-Band K•P Calculation of the Hole Mobility in Silicon Inversion Layers: Dependence on Surface Orientation, Strain, and Silicon Thickness J. Appl. Phys. 2005, 94, 1079-1095
    • (2005) J. Appl. Phys. , vol.94 , pp. 1079-1095
    • Fischetti, M.V.1    Ren, Z.2    Solomon, P.M.3    Yang, M.4    Rim, K.5
  • 3
    • 0001558745 scopus 로고
    • InAs/GaAs Pyramidal Quantum Dots: Strain Distribution, Optical Phonons, and Electronic Structure
    • Grundmann, M.; Stier, O; Bimberg, D. InAs/GaAs Pyramidal Quantum Dots: Strain Distribution, Optical Phonons, and Electronic Structure Phys. Rev. B 1995, 52, 11969-11981
    • (1995) Phys. Rev. B , vol.52 , pp. 11969-11981
    • Grundmann, M.1    Stier, O.2    Bimberg, D.3
  • 4
    • 0342853202 scopus 로고    scopus 로고
    • High-mobility Si and Ge structures
    • PII S0268124297632885
    • Schäffler, F. High-Mobility Si and Ge Structures Semicond. Sci. Technol. 1997, 12, 1515-1549 (Pubitemid 127631394)
    • (1997) Semiconductor Science and Technology , vol.12 , Issue.12 , pp. 1515-1549
    • Schaffler, F.1
  • 6
    • 33751329315 scopus 로고    scopus 로고
    • Polar optical phonons in a semiconductor quantum-well: The complete matching problem
    • DOI 10.1016/j.physb.2006.05.347, PII S0921452606012543
    • Nieto, J. M.; Comas, F. Polar Optical Phonons in a Semiconductor Quantum-Well: The Complete Matching Problem Physica B 2007, 388, 153-158 (Pubitemid 44803212)
    • (2007) Physica B: Condensed Matter , vol.388 , Issue.1-2 , pp. 153-158
    • Nieto, J.M.1    Comas, F.2
  • 7
    • 0031170519 scopus 로고    scopus 로고
    • Effect of strain on structure and morphology of ultrathin Ge films on Si(001)
    • Liu, F.; Wu, F.; Lagally, M. G. Effect of Strain on Structure and Morphology of Ultrathin Ge on Si(001) Chem. Rev. 1997, 97, 1045-1061 (Pubitemid 127659256)
    • (1997) Chemical Reviews , vol.97 , Issue.4 , pp. 1045-1061
    • Liu, F.1    Wu, F.2    Lagally, M.G.3
  • 8
    • 78649518730 scopus 로고    scopus 로고
    • Strain Effects in Low-Dimensional Transition Metal Oxides
    • 52 and references therein
    • Cao, J.; Wu, J. Strain Effects in Low-Dimensional Transition Metal Oxides Mater. Sci. Eng. R 2011, 71, 35-52 and references therein
    • (2011) Mater. Sci. Eng. R , vol.71 , pp. 35
    • Cao, J.1    Wu, J.2
  • 9
    • 84956260582 scopus 로고
    • The Influence of Discharge Current on the Intrinsic Stress in Mo Films Deposited Using Cylindrical and Planar Magnetron Sputtering Sources
    • Thornton, J. A.; Hoffman, D. W. The Influence of Discharge Current on the Intrinsic Stress in Mo Films Deposited Using Cylindrical and Planar Magnetron Sputtering Sources J. Vac. Sci. Technol., A 1985, 3, 576-579
    • (1985) J. Vac. Sci. Technol., A , vol.3 , pp. 576-579
    • Thornton, J.A.1    Hoffman, D.W.2
  • 10
    • 0032182697 scopus 로고    scopus 로고
    • Stress and strain in the vacuum deposited thin films
    • PII S0042207X98001456
    • Tamulevičius, S. Stress and Strain in Vacuum Deposited Thin Films Vacuum 1998, 51, 127-139 (Pubitemid 128409657)
    • (1998) Vacuum , vol.51 , Issue.2 , pp. 127-139
    • Tamulevicius, S.1
  • 11
    • 0346955939 scopus 로고
    • Defects in Epitaxial Multilayers: I. Misfit Dislocations
    • Matthews, J. W.; Blakeslee, A. E. Defects in Epitaxial Multilayers: I. Misfit Dislocations J. Cryst. Growth 1974, 27, 118-125
    • (1974) J. Cryst. Growth , vol.27 , pp. 118-125
    • Matthews, J.W.1    Blakeslee, A.E.2
  • 12
    • 0842321948 scopus 로고    scopus 로고
    • Impact of Misfit Dislocations on the Polarization Instability of Epitaxial Nanostructured Ferroelectric Perovskites
    • Chu, M.-W.; Szafraniak, I.; Scholz, R.; Harnagea, C.; Hesse, D.; Alexe, M.; Gösele, U. Impact of Misfit Dislocations on the Polarization Instability of Epitaxial Nanostructured Ferroelectric Perovskites Nat. Mater. 2004, 3, 87
    • (2004) Nat. Mater. , vol.3 , pp. 87
    • Chu, M.-W.1    Szafraniak, I.2    Scholz, R.3    Harnagea, C.4    Hesse, D.5    Alexe, M.6    Gösele, U.7
  • 16
    • 33947630254 scopus 로고    scopus 로고
    • Elastically strain-sharing nanomembranes: Flexible and transferable strained silicon and silicon-germanium alloys
    • DOI 10.1088/0022-3727/40/4/R01, PII S0022372707991809, R01
    • Scott, S. A.; Lagally, M. G. Elastically Strain-Sharing Nanomembranes: Flexible and Transferable Strained Silicon and Silicon-Germanium Alloys J. Phys. D: Appl. Phys. 2007, 40, R75-R92 (Pubitemid 46501555)
    • (2007) Journal of Physics D: Applied Physics , vol.40 , Issue.4
    • Scott, S.A.1    Lagally, M.G.2
  • 17
    • 40949094482 scopus 로고    scopus 로고
    • Thermally processed high-mobility MOS thin-film transistors on transferable single-crystal elastically strain-sharing Si/SiGe/Si nanomembranes
    • DOI 10.1109/TED.2007.914833
    • Yuan, H.-C.; Kelly, M. M.; Savage, D. E.; Lagally, M. G.; Celler, G. K.; Ma, Z. Thermally Processed High-Mobility MOS Thin-Film Transistors on Transferable Single-Crystal Elastically Strain-Sharing Si/SiGe/Si Nanomembranes IEEE Trans. Electron Devices 2008, 55, 810-815 (Pubitemid 351404538)
    • (2008) IEEE Transactions on Electron Devices , vol.55 , Issue.3 , pp. 810-815
    • Yuan, H.-C.1    Kelly, M.M.2    Savage, D.E.3    Lagally, M.G.4    Celler, G.K.5    Ma, Z.6
  • 21
    • 77954302015 scopus 로고    scopus 로고
    • Electronic Phase Diagram of Single-Element Silicon "strain" Superlattice
    • Liu, Z.; Wu, J.; Duan, W.; Lagally, M. G.; Liu, F. Electronic Phase Diagram of Single-Element Silicon "Strain" Superlattice Phys. Rev. Lett. 2010, 105, 016802
    • (2010) Phys. Rev. Lett. , vol.105 , pp. 016802
    • Liu, Z.1    Wu, J.2    Duan, W.3    Lagally, M.G.4    Liu, F.5
  • 23
    • 0040158433 scopus 로고    scopus 로고
    • GaN Metal-Semiconductor-Metal Photodetectors Grown on Lithium Gallate Substrates by Molecular-Beam Epitaxy
    • Seo, S. W.; Lee, K. K.; Kang, S.; Huang, S.; Doolittle, W. A.; Jokerest, N. M.; Brown, A. S. GaN Metal-Semiconductor-Metal Photodetectors Grown on Lithium Gallate Substrates by Molecular-Beam Epitaxy Appl. Phys. Lett. 2001, 79, 1372-1375
    • (2001) Appl. Phys. Lett. , vol.79 , pp. 1372-1375
    • Seo, S.W.1    Lee, K.K.2    Kang, S.3    Huang, S.4    Doolittle, W.A.5    Jokerest, N.M.6    Brown, A.S.7
  • 27
    • 44349178626 scopus 로고    scopus 로고
    • Anisotropic Optical Properties of Free and Bound Excitons in Highly Strained A -Plane ZnO Investigated with Polarized Photoreflectance and Photoluminescence Spectroscopy
    • Nam, Y. S.; Lee, S. W.; Baek, K. S.; Chang, S. K.; Song, J.-H.; Song, J.-H.; Han, S. K.; Yao, T. Anisotropic Optical Properties of Free and Bound Excitons in Highly Strained A -Plane ZnO Investigated with Polarized Photoreflectance and Photoluminescence Spectroscopy Appl. Phys. Lett. 2008, 92, 201907
    • (2008) Appl. Phys. Lett. , vol.92 , pp. 201907
    • Nam, Y.S.1    Lee, S.W.2    Baek, K.S.3    Chang, S.K.4    Song, J.-H.5    Song, J.-H.6    Han, S.K.7    Yao, T.8
  • 29
    • 29144497242 scopus 로고    scopus 로고
    • Nanomechanical architecture of strained bilayer thin films: From design principles to experimental fabrication
    • DOI 10.1002/adma.200501353
    • Huang, M. H.; Boone, C.; Roberts, M.; Savage, D. E.; Lagally, M. G.; Shaji, N.; Qin, H.; Blick, R.; Naim, J. A.; Liu, F. Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication Adv. Mater. 2005, 17, 2860-2864 (Pubitemid 41797813)
    • (2005) Advanced Materials , vol.17 , Issue.23 , pp. 2860-2864
    • Huang, M.1    Boons, C.2    Roberts, M.3    Savage, D.E.4    Lagally, M.G.5    Shaji, N.6    Qin, H.7    Blick, R.8    Nairn, J.A.9    Liu, F.10
  • 30
  • 33
    • 76549120175 scopus 로고    scopus 로고
    • Phenomenological Analysis of Phase Transistions in Epitaxial Perovskite Ferroelectric Thin Films
    • Bai, G.; Ma, W. Phenomenological Analysis of Phase Transistions in Epitaxial Perovskite Ferroelectric Thin Films Physica B 2010, 405, 1901-1907
    • (2010) Physica B , vol.405 , pp. 1901-1907
    • Bai, G.1    Ma, W.2
  • 34
    • 36849141789 scopus 로고
    • Young's Modulus, Shear Modulus, and Poisson's Ratio in Silicon and Germanium
    • Wortman, J. J.; Evans, R. A. Young's Modulus, Shear Modulus, and Poisson's Ratio in Silicon and Germanium J. Appl. Phys. 1965, 36, 153-156
    • (1965) J. Appl. Phys. , vol.36 , pp. 153-156
    • Wortman, J.J.1    Evans, R.A.2
  • 37
    • 33947321715 scopus 로고    scopus 로고
    • Growth temperature dependence of lattice structures of SiGe/graded buffer structures grown on Si(1 1 0) substrates by gas-source MBE
    • DOI 10.1016/j.jcrysgro.2006.11.135, PII S002202480601400X
    • Arimoto, K.; Yamamamka, J.; Nakagawa, K.; Sawano, K.; Shiraki, Y.; Usami, N.; Nakajima, K. Growth Temperature Dependence of Lattice Structures of SiGe/Graded Buffer Structures Grown on Si(110) Substrates by Gas-Source MBE J. Cryst. Growth 2007, 301, 343-348 (Pubitemid 46441093)
    • (2007) Journal of Crystal Growth , vol.301-302 , Issue.SPEC. ISS. , pp. 343-348
    • Arimoto, K.1    Yamanaka, J.2    Nakagawa, K.3    Sawano, K.4    Shiraki, Y.5    Usami, N.6    Nakajima, K.7
  • 38
    • 69749121640 scopus 로고    scopus 로고
    • Structural Properties of Tensily Strained Si Layers Grown on SiGe (100), (110), and (111) Virtual Substrates
    • Destefanis, V.; Rouchon, D.; Hartmann, J. M.; Papon, A. M.; Baud, L.; Crisci, A.; Mermoux, M. Structural Properties of Tensily Strained Si Layers Grown on SiGe (100), (110), and (111) Virtual Substrates J. Appl. Phys. 2009, 106, 043508
    • (2009) J. Appl. Phys. , vol.106 , pp. 043508
    • Destefanis, V.1    Rouchon, D.2    Hartmann, J.M.3    Papon, A.M.4    Baud, L.5    Crisci, A.6    Mermoux, M.7
  • 40
    • 0028767879 scopus 로고
    • The Intrinsic Stress of Polycrystalline and Epitaxial Thin Metal Films
    • Koch, R. The Intrinsic Stress of Polycrystalline and Epitaxial Thin Metal Films J. Phys.: Condens. Matter 1994, 6, 9519-9550
    • (1994) J. Phys.: Condens. Matter , vol.6 , pp. 9519-9550
    • Koch, R.1
  • 41
    • 0037254375 scopus 로고    scopus 로고
    • A Scanning Tunneling Microscopy Study of Dysprosium Silicide Nanowire Growth on Si(001)
    • Liu, B. Z.; Nogmai, J. A Scanning Tunneling Microscopy Study of Dysprosium Silicide Nanowire Growth on Si(001) J. Appl. Phys. 2003, 93, 593-599
    • (2003) J. Appl. Phys. , vol.93 , pp. 593-599
    • Liu, B.Z.1    Nogmai, J.2
  • 42
    • 33744530680 scopus 로고    scopus 로고
    • Mechanically Flexible Thin-Film Transistors that Use Ultrathin Ribbons of Silicon Derived from Bulk Wafers
    • Mack, S.; Meitl, M. A.; Baca, J.; Zhu, Z.-T.; Rogers, J. A. Mechanically Flexible Thin-Film Transistors that Use Ultrathin Ribbons of Silicon Derived from Bulk Wafers Appl. Phys. Lett. 2006, 88, 213101
    • (2006) Appl. Phys. Lett. , vol.88 , pp. 213101
    • MacK, S.1    Meitl, M.A.2    Baca, J.3    Zhu, Z.-T.4    Rogers, J.A.5
  • 43
    • 0041506993 scopus 로고    scopus 로고
    • Growth of Parallel Rare-Earth Silicide Nanowire Arrays on Vicinal Si(001)
    • Liu, B. Z.; Nogmai, J. Growth of Parallel Rare-Earth Silicide Nanowire Arrays on Vicinal Si(001) Nanotechnology 2003, 14, 873-877
    • (2003) Nanotechnology , vol.14 , pp. 873-877
    • Liu, B.Z.1    Nogmai, J.2
  • 46
    • 0343973898 scopus 로고
    • x/Si Heterostructures
    • x/Si Heterostructures J. Appl. Phys. 1991, 70, 2136-2151
    • (1991) J. Appl. Phys. , vol.70 , pp. 2136-2151
    • Houghton, D.C.1
  • 49
    • 0030287605 scopus 로고    scopus 로고
    • Strain relaxation and dislocations in SiGe/Si structures
    • DOI 10.1016/S0927-796X(96)00192-1, PII S0927796X96001921
    • Mooney, P. M. Strain Relaxation and Dislocations in SiGe/Si Structures Mater. Sci. Eng. 1996, R17, 105-146 (Pubitemid 126401084)
    • (1996) Materials Science and Engineering R: Reports , vol.17 , Issue.3 , pp. 105-146
    • Mooney, P.M.1
  • 53
    • 0000342546 scopus 로고    scopus 로고
    • Softening of Elastic Moduli of Amorphous Semiconductors
    • Mathiondakis, C.; Kelires, P. C. Softening of Elastic Moduli of Amorphous Semiconductors J. Non-Cryst. Solids 2000, 266-269, 161-165
    • (2000) J. Non-Cryst. Solids , vol.266-269 , pp. 161-165
    • Mathiondakis, C.1    Kelires, P.C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.