Elastically relaxed free-standing strained-silicon nanomembranes

Nature Materials

Volumn 5, Issue 5, 2006, Pages 388-393

  Roberts, Michelle M ^a   Klein, Levente J ^a   Savage, Donald E ^a   Slinker, Keith A ^a   Friesen, Mark ^a   Celler, George ^b   Eriksson, Mark A ^a   Lagally, Max G ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b Soitec USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; ELASTICITY TESTING; ELECTRONIC PROPERTIES; HALL EFFECT; RELAXATION PROCESSES; STRAIN;

BAND OFFSETS; CONTROL MOBILITY; CONTROL STRAIN; NANOMEMBRANES;

NANOTECHNOLOGY;

EID: 33646486240     PISSN: 14761122     EISSN: 14764660     Source Type: Journal    
DOI: 10.1038/nmat1606     Document Type: Article

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