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Materials Science and Engineering R: Reports

Volumn 17, Issue 3, 1996, Pages 105-146

Strain relaxation and dislocations in SiGe/Si structures

(1) Mooney, P M a

a IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

Dislocations; Electronic properties; Strain relaxation

Indexed keywords

DISLOCATIONS (CRYSTALS); ELECTRONIC STRUCTURE; EPITAXIAL GROWTH; FIELD EFFECT TRANSISTORS; LATTICE CONSTANTS; MICROELECTRONICS; OPTOELECTRONIC DEVICES; SEMICONDUCTING GERMANIUM; STRESS RELAXATION; THIN FILMS;

BUFFER LAYERS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0030287605 PISSN: 0927796X EISSN: None Source Type: Journal
DOI: 10.1016/S0927-796X(96)00192-1 Document Type: Article

Times cited : (138)

References (135)

1
- 0029346245
- R.L. Gunshor and A.V. Nurmikko, MRS Bulletin, 20 (7) (1995) 17; S. Guha, Semicond. Sci. Technol., in press.
- (1995) MRS Bulletin , vol.20 , Issue.7 , pp. 17
- Gunshor, R.L.¹ Nurmikko, A.V.²

2
- 0029346245
- in press
- R.L. Gunshor and A.V. Nurmikko, MRS Bulletin, 20 (7) (1995) 17; S. Guha, Semicond. Sci. Technol., in press.
- Semicond. Sci. Technol.
- Guha, S.¹

3
- 0027612152
- S.L. Yellen, A.H. Shepard, R.J. Dalby, J.A. Baumann, H.B. Serreze, T.S. Guido, R. Soltz, K.J. Bystrom, C.M. Harding and R.G. Waters, IEEE J. Quantum Electron., 29 (1993) 2058.
- (1993) IEEE J. Quantum Electron. , vol.29 , pp. 2058
- Yellen, S.L.¹ Shepard, A.H.² Dalby, R.J.³ Baumann, J.A.⁴ Serreze, H.B.⁵ Guido, T.S.⁶ Soltz, R.⁷ Bystrom, K.J.⁸ Harding, C.M.⁹ Waters, R.G.¹⁰

4
- 0041315819
- D.V. Morgan and R.H. Williams (eds.), Ch. 5, Peter Peregrinus Ltd, London
- P.J. Tasker, in D.V. Morgan and R.H. Williams (eds.), Physics and Technology of heterojunction Devices, Ch. 5, Peter Peregrinus Ltd, London, 1991.
- (1991) Physics and Technology of Heterojunction Devices
- Tasker, P.J.¹

5
- 0042317208
- B.S. Meyerson, D.L. Harame, J. Stork, E. Crabbe, J. Comfort and G. Patton, Int. J. High Speed Electron. Systems, 5 (1994) 473.
- (1994) Int. J. High Speed Electron. Systems , vol.5 , pp. 473
- Meyerson, B.S.¹ Harame, D.L.² Stork, J.³ Crabbe, E.⁴ Comfort, J.⁵ Patton, G.⁶

6
- 0027629428
- K. Ismail, S. Rishton, J.O. Chu, K. Chan, S.F. Nelson and B.S. Meyerson, IEEE Electron Device Lett., EDL-14 (1993) 348.
- (1993) IEEE Electron Device Lett. , vol.EDL-14 , pp. 348
- Ismail, K.¹ Rishton, S.² Chu, J.O.³ Chan, K.⁴ Nelson, S.F.⁵ Meyerson, B.S.⁶

7
- 0030109420
- M. Arafa, P. Fay, K. Ismail, J.O. Chu, B.S. Meyerson and I. Adesida, IEEE Electron Device Lett., 17 (1996) 124; M. Arafa, K. Ismail, P. Fay, J.O. Chu, B.S. Meyerson and I. Adesida, Electron. Lett., 31 (1995) 680.
- (1996) IEEE Electron Device Lett. , vol.17 , pp. 124
- Arafa, M.¹ Fay, P.² Ismail, K.³ Chu, J.O.⁴ Meyerson, B.S.⁵ Adesida, I.⁶

8
- 0029291270
- M. Arafa, P. Fay, K. Ismail, J.O. Chu, B.S. Meyerson and I. Adesida, IEEE Electron Device Lett., 17 (1996) 124; M. Arafa, K. Ismail, P. Fay, J.O. Chu, B.S. Meyerson and I. Adesida, Electron. Lett., 31 (1995) 680.
- (1995) Electron. Lett. , vol.31 , pp. 680
- Arafa, M.¹ Ismail, K.² Fay, P.³ Chu, J.O.⁴ Meyerson, B.S.⁵ Adesida, I.⁶

9
- 0027577698
- U. Konig and F. Schaeffler, IEEE Trans. Electron Device Lett., EDL-14 (1993) 205.
- (1993) IEEE Trans. Electron Device Lett. , vol.EDL-14 , pp. 205
- Konig, U.¹ Schaeffler, F.²

10
- 0001279324
- Y.H. Xie, D. Monroe, E.A. Fitzgerald, P.J. Silverman, F.A. Theil and G.P. Watson, Appl. Phys. Lett., 63 (1993) 2263.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 2263
- Xie, Y.H.¹ Monroe, D.² Fitzgerald, E.A.³ Silverman, P.J.⁴ Theil, F.A.⁵ Watson, G.P.⁶

11
- 0000084967
- E.A. Fitzgerald, Y.H. Xie. D. Monroe, P.J. Silverman, J.M. Kuo, A.R. Kortan, F.A. Thiel and B.E. Weir, J. Vac. Sci. Technol., B10 (1992) 1807.
- (1992) J. Vac. Sci. Technol. , vol.B10 , pp. 1807
- Fitzgerald, E.A.¹ Xie, Y.H.² Monroe, D.³ Silverman, P.J.⁴ Kuo, J.M.⁵ Kortan, A.R.⁶ Thiel, F.A.⁷ Weir, B.E.⁸

12
- 0029346143
- H.H. Wieder, R.S. Goldman, J. Chen and A.P. Young, J. Vac. Sci. Technol., B13 (1995) 1853; A.N. Chang, H.H. Wieder and W.S.C. Chang, IEEE Photonics Technol. Lett., 7 (1995) 1159.
- (1995) J. Vac. Sci. Technol. , vol.B13 , pp. 1853
- Wieder, H.H.¹ Goldman, R.S.² Chen, J.³ Young, A.P.⁴

13
- 0029394246
- H.H. Wieder, R.S. Goldman, J. Chen and A.P. Young, J. Vac. Sci. Technol., B13 (1995) 1853; A.N. Chang, H.H. Wieder and W.S.C. Chang, IEEE Photonics Technol. Lett., 7 (1995) 1159.
- (1995) IEEE Photonics Technol. Lett. , vol.7 , pp. 1159
- Chang, A.N.¹ Wieder, H.H.² Chang, W.S.C.³

14
- 0021177531
- J.C. Bean, T.T. Sheng, L.C. Feldman, A.T. Fiory and R.T. Lynch, Appl. Phys. Lett., 44 (1984) 102.
- (1984) Appl. Phys. Lett. , vol.44 , pp. 102
- Bean, J.C.¹ Sheng, T.T.² Feldman, L.C.³ Fiory, A.T.⁴ Lynch, R.T.⁵

15
- 0029344758
- T.O. Sedgwick and D.A. Grützmacher, J. Electrochem. Soc., 142 (1995) 2458.
- (1995) J. Electrochem. Soc. , vol.142 , pp. 2458
- Sedgwick, T.O.¹ Grützmacher, D.A.²

16
- 0002092628
- D. Dutartre, P. Warren, I. Berbezier and P. Perret, Thin Solid Films, 222 (1992) 52.
- (1992) Thin Solid Films , vol.222 , pp. 52
- Dutartre, D.¹ Warren, P.² Berbezier, I.³ Perret, P.⁴

17
- 5844399719
- B.S. Meyerson, Appl. Phys. Lett., 48 (1986) 797.
- (1986) Appl. Phys. Lett. , vol.48 , pp. 797
- Meyerson, B.S.¹

18
- 36449008424
- K. Ismail, M. Arafa, K.L. Saenger, J.O. Chu and B.S. Meyerson, Appl. Phys. Lett., 66 (1995) 1077.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1077
- Ismail, K.¹ Arafa, M.² Saenger, K.L.³ Chu, J.O.⁴ Meyerson, B.S.⁵

19
- 36449009561
- K. Ismail, M. Arafa, F. Stern, J.O. Chu and B.S. Meyerson, Appl. Phys. Lett., 66 (1995) 842.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 842
- Ismail, K.¹ Arafa, M.² Stern, F.³ Chu, J.O.⁴ Meyerson, B.S.⁵

20
- 0026820313
- F. Schaeffler, D. Tobben, H.J. Herzog, G. Abstreiter and B. Hollander, Semicond. Sci. Technol., 7 (1992) 260.
- (1992) Semicond. Sci. Technol. , vol.7 , pp. 260
- Schaeffler, F.¹ Tobben, D.² Herzog, H.J.³ Abstreiter, G.⁴ Hollander, B.⁵

21
- 36449003379
- Y.J. Mii, Y.H. Xie, E.A. Fitzgerald, D. Monroe, F.A. Theil and B.E. Weir, Appl. Phys. Lett., 59 (1991) 1611.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 1611
- Mii, Y.J.¹ Xie, Y.H.² Fitzgerald, E.A.³ Monroe, D.⁴ Theil, F.A.⁵ Weir, B.E.⁶

22
- 0000325686
- M.M. Reiger and P. Vogl., Phys. Rev. B, 19 (1993) 14276.
- (1993) Phys. Rev. B , vol.19 , pp. 14276
- Reiger, M.M.¹ Vogl, P.²

23
- 36149024990
- R. Braunstein, A.R. Moore and F. Herman, Phys. Rev., 109 (1958) 695.
- (1958) Phys. Rev. , vol.109 , pp. 695
- Braunstein, R.¹ Moore, A.R.² Herman, F.³

24
- 0000655054
- K. Ismail, F.K. LeGoues, K.L. Saenger, M. Arafa, J.O. Chu, P.M. Mooney and B.S. Meyerson, Phys. Rev. Lett., 73 (1994) 3447.
- (1994) Phys. Rev. Lett. , vol.73 , pp. 3447
- Ismail, K.¹ LeGoues, F.K.² Saenger, K.L.³ Arafa, M.⁴ Chu, J.O.⁵ Mooney, P.M.⁶ Meyerson, B.S.⁷

25
- 33144456500
- G. Abstreiter, H. Brugger, T. Wolf, H. Jorke and H.J. Herzog, Phys. Rev. Lett., 54 (1985) 2441.
- (1985) Phys. Rev. Lett. , vol.54 , pp. 2441
- Abstreiter, G.¹ Brugger, H.² Wolf, T.³ Jorke, H.⁴ Herzog, H.J.⁵

26
- 0001632392
- K. Ismail, B.S. Meyerson and P.J. Wang, Appl. Phys. Lett., 58 (1991) 2117.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 2117
- Ismail, K.¹ Meyerson, B.S.² Wang, P.J.³

27
- 36449002419
- S.F. Nelson, K. Ismail, T.N. Jackson, J.J. Nocera, J.O. Chu and B.S. Meyerson, Appl. Phys. Lett., 63 (1993) 794.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 794
- Nelson, S.F.¹ Ismail, K.² Jackson, T.N.³ Nocera, J.J.⁴ Chu, J.O.⁵ Meyerson, B.S.⁶

28
- 0042317211
- K. Ismail, Solid State Phen., 47-48 (1996) 409.
- (1996) Solid State Phen. , vol.47-48 , pp. 409
- Ismail, K.¹

29
- 36449000816
- F. Stern and S.E. Laux, Appl. Phys. Lett., 61 (1992) 1110.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 1110
- Stern, F.¹ Laux, S.E.²

30
- 0005798719
- D. Monroe, Y.H. Xie, E.A. Fitzgerald, P.J. Silverman and G.P. Watson, J. Vac. Sci. Technol. B, 11 (1993) 1731.
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 1731
- Monroe, D.¹ Xie, Y.H.² Fitzgerald, E.A.³ Silverman, P.J.⁴ Watson, G.P.⁵

31
- 0029346737
- R.M. Feenstra, M.A. Lutz, F. Stern, K. Ismail, P.M. Mooney, F.K. LeGoues, C. Stanis, J.O. Chu and B.S. Meyerson, J. Vac. Sci. Technol. B, 13 (1995) 1608.
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 1608
- Feenstra, R.M.¹ Lutz, M.A.² Stern, F.³ Ismail, K.⁴ Mooney, P.M.⁵ LeGoues, F.K.⁶ Stanis, C.⁷ Chu, J.O.⁸ Meyerson, B.S.⁹

32
- 0000085565
- R.M. Feenstra and M.A. Lutz, J. Appl. Phys., 78 (1995) 6091.
- (1995) J. Appl. Phys. , vol.78 , pp. 6091
- Feenstra, R.M.¹ Lutz, M.A.²

33
- 0042818305
- personal communication
- K. Ismail, personal communication, 1996.
- (1996)
- Ismail, K.¹

34
- 36449003992
- K. Ismail, F. Nelson, J.O. Chu and B.S. Meyerson, Appl. Phys. Lett., 63 (1993) 660.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 660
- Ismail, K.¹ Nelson, F.² Chu, J.O.³ Meyerson, B.S.⁴

35
- 0029375742
- A. Sadek and K. Ismail, Solid State Electron., 38 (1995) 1731
- (1995) Solid State Electron. , vol.38 , pp. 1731
- Sadek, A.¹ Ismail, K.²

36
- 0001888922
- D.V. Lang, R. People, J.C. Bean and A.M. Sergent, Appl. Phys. Lett., 47 (1985) 1333.
- (1985) Appl. Phys. Lett. , vol.47 , pp. 1333
- Lang, D.V.¹ People, R.² Bean, J.C.³ Sergent, A.M.⁴

37
- 36449008939
- K. Ismail, J.O. Chu and B.S. Meyerson, Appl. Phys. Lett., 64 (1994) 3124.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 3124
- Ismail, K.¹ Chu, J.O.² Meyerson, B.S.³

38
- 0342709009
- J.H. Van der Merwe, J. Appl. Phys., 34 (1963) 117; J.H. Van der Merwe, J. Appl. Phys., 34 (1963) 123.
- (1963) J. Appl. Phys. , vol.34 , pp. 117
- Van Der Merwe, J.H.¹

39
- 36849116975
- J.H. Van der Merwe, J. Appl. Phys., 34 (1963) 117; J.H. Van der Merwe, J. Appl. Phys., 34 (1963) 123.
- (1963) J. Appl. Phys. , vol.34 , pp. 123
- Van Der Merwe, J.H.¹

40
- 33744558557
- J.W. Mathews and A.E. Blakesley, J. Cryst. Growth, 29 (1975) 273; J.W. Mathews and A.E. Blakesley, J. Cryst. Growth, 32 (1976) 265.
- (1975) J. Cryst. Growth , vol.29 , pp. 273
- Mathews, J.W.¹ Blakesley, A.E.²

41
- 4143078533
- J.W. Mathews and A.E. Blakesley, J. Cryst. Growth, 29 (1975) 273; J.W. Mathews and A.E. Blakesley, J. Cryst. Growth, 32 (1976) 265.
- (1976) J. Cryst. Growth , vol.32 , pp. 265
- Mathews, J.W.¹ Blakesley, A.E.²

42
- 0026259968
- E.A. Fitzgerald, Mater. Sci. Rep., 7 (1991) 87.
- (1991) Mater. Sci. Rep. , vol.7 , pp. 87
- Fitzgerald, E.A.¹

43
- 0004291219
- International Series on Materials Science and Technology, Ch. 3, Pergamon, New York
- D. Hull and D.J. Bacon, Introduction to Dislocations, 3rd Edition, International Series on Materials Science and Technology, Vol. 37, Ch. 3, Pergamon, New York, 1984.
- (1984) Introduction to Dislocations, 3rd Edition , vol.37
- Hull, D.¹ Bacon, D.J.²

44
- 36549103442
- C.G. Tuppen and C.J. Gibbings, J. Appl. Phys., 68 (1990) 1526
- (1990) J. Appl. Phys. , vol.68 , pp. 1526
- Tuppen, C.G.¹ Gibbings, C.J.²

45
- 0042556688
- D.C. Houghton, Appl. Phys. Lett., 57 (1990) 2124.
- (1990) Appl. Phys. Lett. , vol.57 , pp. 2124
- Houghton, D.C.¹

46
- 0000183092
- R. Hull, J.C. Bean, D. Bahnck, L.J. Peticolas, Jr., K.T. Short and F.C. Unterwald, J. Appl. Phys., 70 (1991) 2052.
- (1991) J. Appl. Phys. , vol.70 , pp. 2052
- Hull, R.¹ Bean, J.C.² Bahnck, D.³ Peticolas L.J., Jr.⁴ Short, K.T.⁵ Unterwald, F.C.⁶

47
- 6744271232
- R. Hull and J.C. Bean, Phys. Stat. Solidi. (a), 138 (1993) 533.
- (1993) Phys. Stat. Solidi. (A) , vol.138 , pp. 533
- Hull, R.¹ Bean, J.C.²

48
- 36549093303
- W. Dodson and J.Y. Tsao, Appl. Phys. Lett., 51 (1987) 1325.
- (1987) Appl. Phys. Lett. , vol.51 , pp. 1325
- Dodson, W.¹ Tsao, J.Y.²

49
- 0003531591
- Ch. 15, Kreiger Publishing, Malabar, FL
- J.P. Hirth and J. Lothe, Theory of Dislocations 2nd Edition, Ch. 15, Kreiger Publishing, Malabar, FL, 1992.
- (1992) Theory of Dislocations 2nd Edition
- Hirth, J.P.¹ Lothe, J.²

50
- 84910817242
- M.H. Grabow and G.H. Gilmer, Mater. Res. Soc. Symp. Proc., 94 (1987) 15.
- (1987) Mater. Res. Soc. Symp. Proc. , vol.94 , pp. 15
- Grabow, M.H.¹ Gilmer, G.H.²

51
- 36549099314
- P.M.J. Maree et al., J. Appl. Phys., 62 (1987) 4413.
- (1987) J. Appl. Phys. , vol.62 , pp. 4413
- Maree, P.M.J.¹

52
- 84955114258
- R. Hull and J.C. Bean, J. Vac. Sci. Technol., A7 (1989) 2580.
- (1989) J. Vac. Sci. Technol. , vol.A7 , pp. 2580
- Hull, R.¹ Bean, J.C.²

53
- 21544434863
- E.A. Fitzgerald et al., J. Appl. Phys., 65 (1989) 2220.
- (1989) J. Appl. Phys. , vol.65 , pp. 2220
- Fitzgerald, E.A.¹

54
- 0024668417
- D.J. Eaglesham et al., Philos. Mag., 59 (1989) 1059.
- (1989) Philos. Mag. , vol.59 , pp. 1059
- Eaglesham, D.J.¹

55
- 0004773168
- S.V. Kamut and J.P. Hirth, J. Appl. Phys., 67 (1990) 6844.
- (1990) J. Appl. Phys. , vol.67 , pp. 6844
- Kamut, S.V.¹ Hirth, J.P.²

56
- 0001337626
- D.D. Perovic and D.C. Houghton, Mater. Res. Soc. Symp. Proc., 263 (1992) 391.
- (1992) Mater. Res. Soc. Symp. Proc. , vol.263 , pp. 391
- Perovic, D.D.¹ Houghton, D.C.²

57
- 0018007058
- W. Hagen and W. Strunk, J. Appl. Phys., 17 ( 1978) 85.
- (1978) J. Appl. Phys. , vol.17 , pp. 85
- Hagen, W.¹ Strunk, W.²

58
- 28444459024
- F.K. LeGoues, B.S. Meyerson, J.F. Morar and P.D. Kirchner, J. Appl. Phys., 71 (1992) 4230; F.K. LeGoues, B.S. Meyerson and F.J. Morar, Phys. Rev. Lett., 66 (1991) 2903.
- (1992) J. Appl. Phys. , vol.71 , pp. 4230
- LeGoues, F.K.¹ Meyerson, B.S.² Morar, J.F.³ Kirchner, P.D.⁴

59
- 0343371987
- F.K. LeGoues, B.S. Meyerson, J.F. Morar and P.D. Kirchner, J. Appl. Phys., 71 (1992) 4230; F.K. LeGoues, B.S. Meyerson and F.J. Morar, Phys. Rev. Lett., 66 (1991) 2903.
- (1991) Phys. Rev. Lett. , vol.66 , pp. 2903
- LeGoues, F.K.¹ Meyerson, B.S.² Morar, F.J.³

60
- 0000840685
- M.A. Capano, Phys. Rev. B, 45 (1992) 11768.
- (1992) Phys. Rev. B , vol.45 , pp. 11768
- Capano, M.A.¹

61
- 0001693375
- B.J. Spencer, P.W. Voorhees and S.H. Davis, Phys. Rev. Lett., 67 (1991) 3696.
- (1991) Phys. Rev. Lett. , vol.67 , pp. 3696
- Spencer, B.J.¹ Voorhees, P.W.² Davis, S.H.³

62
- 21544478296
- B.C. Orr, D. Kessler and C.W. Snyder, Europhys. Lett., 19 (1992) 33.
- (1992) Europhys. Lett. , vol.19 , pp. 33
- Orr, B.C.¹ Kessler, D.² Snyder, C.W.³

63
- 0000861083
- W.H. Yang and D.J. Srolovitz, Phys. Rev. Lett., 71 (1993) 1593.
- (1993) Phys. Rev. Lett. , vol.71 , pp. 1593
- Yang, W.H.¹ Srolovitz, D.J.²

64
- 3343007423
- J. Tersoff and F.K. LeGoues, Phys. Rev. Lett., 72 (1994) 3570.
- (1994) Phys. Rev. Lett. , vol.72 , pp. 3570
- Tersoff, J.¹ LeGoues, F.K.²

65
- 0001390252
- D.E. Jesson, S.J. Pennycook, J.-M. Baribeau and D.C. Houghton, Phys. Rev. Lett., 71 (1993) 1744.
- (1993) Phys. Rev. Lett. , vol.71 , pp. 1744
- Jesson, D.E.¹ Pennycook, S.J.² Baribeau, J.-M.³ Houghton, D.C.⁴

66
- 36549092192
- B.S. Meyerson, K.J. Uram and F.K. LeGoues, Appl. Phys. Lett., 53 (1988) 2555.
- (1988) Appl. Phys. Lett. , vol.53 , pp. 2555
- Meyerson, B.S.¹ Uram, K.J.² LeGoues, F.K.³

67
- 0012038692
- F.K. LeGoues, Phys. Rev. Lett., 72 (1994) 876.
- (1994) Phys. Rev. Lett. , vol.72 , pp. 876
- LeGoues, F.K.¹

68
- 3643130905
- D.J. Eaglesham et al., Phys. Rev. Lett., 64 (1990) 1943.
- (1990) Phys. Rev. Lett. , vol.64 , pp. 1943
- Eaglesham, D.J.¹

69
- 0028497335
- M.A. Lutz, R.M. Feenstra, P.M. Mooney, J. Tersoff and J.O. Chu, Surf. Sci., 316 (1994) L1075.
- (1994) Surf. Sci. , vol.316
- Lutz, M.A.¹ Feenstra, R.M.² Mooney, P.M.³ Tersoff, J.⁴ Chu, J.O.⁵

70
- 36449001750
- M.A. Lutz, R.M. Feenstra, F.K. LeGoues, P.M. Mooney and J.O. Chu, Appl. Phys. Lett., 66 (1995) 724.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 724
- Lutz, M.A.¹ Feenstra, R.M.² LeGoues, F.K.³ Mooney, P.M.⁴ Chu, J.O.⁵

71
- 0001759401
- S.Y. Shiryaev, F. Jensen and J.W. Petersen, Appl. Phys. Lett., 64 (1994) 3305.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 3305
- Shiryaev, S.Y.¹ Jensen, F.² Petersen, J.W.³

72
- 84967851232
- D. Dutartre, P. Warren, F. Provenier, F. Chollet and Pério, J. Vac. Sci. Technol. A, 12 (1994) 1009.
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 1009
- Dutartre, D.¹ Warren, P.² Provenier, F.³ Chollet, F.⁴ Pério⁵

73
- 0042660346
- G.P. Watson, E.A. Fitzgerald, Y.H. Xie and D. Monroe, J. Appl. Phys., 75 (1994) 263.
- (1994) J. Appl. Phys. , vol.75 , pp. 263
- Watson, G.P.¹ Fitzgerald, E.A.² Xie, Y.H.³ Monroe, D.⁴

74
- 36448998773
- G. Kissinger, T. Morgenstern, G. Morgenstern and H. Richter, Appl. Phys. Lett., 66 (1995) 2083.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 2083
- Kissinger, G.¹ Morgenstern, T.² Morgenstern, G.³ Richter, H.⁴

75
- 0042314788
- G.P. Watson, E.A. Fitzgerald, Y.H. Xie, P.J. Silverman, A.B. White and K.T. Short, Appl. Phys. Lett., 63 (1993) 746.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 746
- Watson, G.P.¹ Fitzgerald, E.A.² Xie, Y.H.³ Silverman, P.J.⁴ White, A.B.⁵ Short, K.T.⁶

76
- 0040056944
- M.A.G. Halliwell, Inst. Phys. Conf. Ser., 60 (1981) 271.
- (1981) Inst. Phys. Conf. Ser. , vol.60 , pp. 271
- Halliwell, M.A.G.¹

77
- 0027701387
- P.F. Fewster, Semicond. Sci. Technol., 8 (1993) 1915.
- (1993) Semicond. Sci. Technol. , vol.8 , pp. 1915
- Fewster, P.F.¹

78
- 0009992781
- P.M. Mooney, J.L. Jordan-Sweet, G.B. Stephenson, F.K. LeGoues and J.O. Chu, Advances in X-ray Analysis, 38 (1993) 181.
- (1993) Advances in X-ray Analysis , vol.38 , pp. 181
- Mooney, P.M.¹ Jordan-Sweet, J.L.² Stephenson, G.B.³ LeGoues, F.K.⁴ Chu, J.O.⁵

79
- 0001024783
- F.K. LeGoues, P.M. Mooney and J.O. Chu, Appl. Phys. Lett., 62 (1993) 140.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 140
- LeGoues, F.K.¹ Mooney, P.M.² Chu, J.O.³

80
- 0000623705
- P.M. Mooney, F.K. LeGoues, J. Tersoff and J.O. Chu, J. Appl. Phys., 75 (1994) 3968.
- (1994) J. Appl. Phys. , vol.75 , pp. 3968
- Mooney, P.M.¹ LeGoues, F.K.² Tersoff, J.³ Chu, J.O.⁴

81
- 3743118433
- F.K. LeGoues, P.M. Mooney and J. Tersoff, Phys. Rev. Lett., 71 (1993) 396.
- (1993) Phys. Rev. Lett. , vol.71 , pp. 396
- LeGoues, F.K.¹ Mooney, P.M.² Tersoff, J.³

82
- 0042317205
- unpublished
- P.M. Mooney, F.K. LeGoues and D. Grützmacher, unpublished.
- Mooney, P.M.¹ LeGoues, F.K.² Grützmacher, D.³

83
- 0041315813
- unpublished
- F.K. LeGoues, unpublished.
- LeGoues, F.K.¹

84
- 36449002786
- Y. Chen, Z. Liliental-Weber, J. Washburn, J.F. Klem and J.Y. Tsao, Appl. Phys. Lett., 66 (1995) 499.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 499
- Chen, Y.¹ Liliental-Weber, Z.² Washburn, J.³ Klem, J.F.⁴ Tsao, J.Y.⁵

85
- 0028674663
- K.L. Kavanagh, R.S. Goldman and C.P. Chang, Scanning Microscopy, 8 (1994) 905.
- (1994) Scanning Microscopy , vol.8 , pp. 905
- Kavanagh, K.L.¹ Goldman, R.S.² Chang, C.P.³

86
- 0000076713
- P.M. Mooney, F.K. LeGoues and J.L. Jordan-Sweet, Appl. Phys. Lett., 65 (1994) 2845.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 2845
- Mooney, P.M.¹ LeGoues, F.K.² Jordan-Sweet, J.L.³

87
- 84957349716
- A.G. Cullis, D.J. Robbins, S.J. Barnett and A. Pidduck, J. Vac. Sci. Technol., A12 (1994) 1924.
- (1994) J. Vac. Sci. Technol. , vol.A12 , pp. 1924
- Cullis, A.G.¹ Robbins, D.J.² Barnett, S.J.³ Pidduck, A.⁴

88
- 0006228802
- J.L. Jordan-Sweet, P.M. Mooney, M.A. Lutz, R.M. Feenstra, J.O. Chu and F.K. LeGoues, J. Appl. Phys., 80 (1996) 89.
- (1996) J. Appl. Phys. , vol.80 , pp. 89
- Jordan-Sweet, J.L.¹ Mooney, P.M.² Lutz, M.A.³ Feenstra, R.M.⁴ Chu, J.O.⁵ LeGoues, F.K.⁶

89
- 0029232020
- J.L. Jordan-Sweet, P.M. Mooney and G.B. Stephenson, Mater. Res. Soc. Symp., 375 (1995) 201.
- (1995) Mater. Res. Soc. Symp. , vol.375 , pp. 201
- Jordan-Sweet, J.L.¹ Mooney, P.M.² Stephenson, G.B.³

90
- 36449001321
- P.M. Mooney, F.K. LeGoues, J.O. Chu and S.F. Nelson, Appl. Phys. Lett., 62 (1993) 3464.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 3464
- Mooney, P.M.¹ LeGoues, F.K.² Chu, J.O.³ Nelson, S.F.⁴

91
- 36449002396
- E. Koppensteiner, P. Hamberger, G. Bauer, V. Holý and E. Kasper, Appl. Phys. Lett., 64 (1994) 172.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 172
- Koppensteiner, E.¹ Hamberger, P.² Bauer, G.³ Holý, V.⁴ Kasper, E.⁵

92
- 33747424588
- E. Koppensteiner, A. Schuh, G. Bauer, V. Holý, G.P. Watson and E.A. Fitzgerald, J. Phys. D: Appl. Phys., 28 (1995) A114.
- (1995) J. Phys. D: Appl. Phys. , vol.28
- Koppensteiner, E.¹ Schuh, A.² Bauer, G.³ Holý, V.⁴ Watson, G.P.⁵ Fitzgerald, E.A.⁶

93
- 0000105583
- V. Holý, J.H. Li, G. Bauer, F. Schäffler and H.-J. Herzog, J. Appl. Phys., 78 (1995) 5013.
- (1995) J. Appl. Phys. , vol.78 , pp. 5013
- Holý, V.¹ Li, J.H.² Bauer, G.³ Schäffler, F.⁴ Herzog, H.-J.⁵

94
- 0000503914
- P.M. Mooney, J.L. Jordan-Sweet, K. Ismail, J.O. Chu, R.M. Feenstra and F.K. LeGoues, Appl. Phys. Lett., 67 (1995) 2373.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2373
- Mooney, P.M.¹ Jordan-Sweet, J.L.² Ismail, K.³ Chu, J.O.⁴ Feenstra, R.M.⁵ LeGoues, F.K.⁶

95
- 0001224199
- P.M. Mooney, J.L. Jordan-Sweet, J.O. Chu and F.K. LeGoues, Appl. Phys. Lett., 66 (1995) 3642.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 3642
- Mooney, P.M.¹ Jordan-Sweet, J.L.² Chu, J.O.³ LeGoues, F.K.⁴

96
- 36449009134
- J.H. Li, E. Koppensteiner, G. Bauer, M. Hohnisch, H.-J. Herzog and F. Schäffler, Appl. Phys. Lett., 67 (1995) 223.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 223
- Li, J.H.¹ Koppensteiner, E.² Bauer, G.³ Hohnisch, M.⁴ Herzog, H.-J.⁵ Schäffler, F.⁶

97
- 0042818298
- J.H. Li, V. Holý, G. Bauer, J.F. Nützel and G. Abstreiter, Appl. Phys. Lett., 67 (1995) 789.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 789
- Li, J.H.¹ Holý, V.² Bauer, G.³ Nützel, J.F.⁴ Abstreiter, G.⁵

98
- 21544482401
- H.J. Leamy, J. Appl. Phys., 53 (1982) R51.
- (1982) J. Appl. Phys. , vol.53
- Leamy, H.J.¹

99
- 36449006709
- J.W.P. Hsu, E.A. Fitzgerald, Y.H. Xie, P.J. Silverman and M.J. Cardillo, Appl. Phys. Lett., 61 (1992) 1293.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 1293
- Hsu, J.W.P.¹ Fitzgerald, E.A.² Xie, Y.H.³ Silverman, P.J.⁴ Cardillo, M.J.⁵

100
- 0001439097
- P.M. Mooney, F.H. Dacol, J.C. Tsang and J.O. Chu, Appl. Phys. Lett., 62 (1993) 2069.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 2069
- Mooney, P.M.¹ Dacol, F.H.² Tsang, J.C.³ Chu, J.O.⁴

101
- 22844432802
- J.C. Tsang, P.M. Mooney, F. Dacol and J.O. Chu, J. Appl. Phys., 75 (1994) 8098.
- (1994) J. Appl. Phys. , vol.75 , pp. 8098
- Tsang, J.C.¹ Mooney, P.M.² Dacol, F.³ Chu, J.O.⁴

102
- 0342708883
- Y.H. Xie, G.H. Gilmer, C. Roland, P.J. Silverman, S.K. Buratto, J.Y. Cheng, E.A. Fitzgerald, A.R. Kortan, S. Schuppler, M.A. Marcus and P.H. Citrin, Phys. Rev. Lett., 73 (1994) 3006.
- (1994) Phys. Rev. Lett. , vol.73 , pp. 3006
- Xie, Y.H.¹ Gilmer, G.H.² Roland, C.³ Silverman, P.J.⁴ Buratto, S.K.⁵ Cheng, J.Y.⁶ Fitzgerald, E.A.⁷ Kortan, A.R.⁸ Schuppler, S.⁹ Marcus, M.A.¹⁰ Citrin, P.H.¹¹

103
- 0028462261
- J.W.P. Hsu, E.A. Fitzgerald, Y.H. Xie and P.J. Silverman, Appl. Phys. Lett., 65 (1994) 344.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 344
- Hsu, J.W.P.¹ Fitzgerald, E.A.² Xie, Y.H.³ Silverman, P.J.⁴

104
- 0038634323
- F.M. Ross, R. Hull, D. Bahnck, J.C. Bean, L.J. Peticolas, R.A. Hamm and H.A. Huggins, J Vac. Sci. Technol. B, 10 (1992) 2008.
- (1992) J Vac. Sci. Technol. B , vol.10 , pp. 2008
- Ross, F.M.¹ Hull, R.² Bahnck, D.³ Bean, J.C.⁴ Peticolas, L.J.⁵ Hamm, R.A.⁶ Huggins, H.A.⁷

105
- 3743152456
- J.R. Chelikowsky, Phys. Rev. Lett., 49 (1982) 1569.
- (1982) Phys. Rev. Lett. , vol.49 , pp. 1569
- Chelikowsky, J.R.¹

106
- 0009180566
- J.R. Chelikowsky and J.C.H. Spence, Phys. Rev. B, 30 (1984) 694.
- (1984) Phys. Rev. B , vol.30 , pp. 694
- Chelikowsky, J.R.¹ Spence, J.C.H.²

107
- 84953599639
- V.V, Bulatov, S. Yip and A.S. Argon, Philos. Mag. A, 72 (1995) 453.
- (1995) Philos. Mag. A , vol.72 , pp. 453
- Bulatov, V.V.¹ Yip, S.² Argon, A.S.³

108
- 4243290968
- K. Masuda-Jindo, Mater. Sci. Forum, 83-87 (1992) 1333.
- (1992) Mater. Sci. Forum , vol.83-87 , pp. 1333
- Masuda-Jindo, K.¹

109
- 0000950516
- Y.M. Huang, J.C.H. Spence and O.F. Sankey, Phys. Rev. Lett., 74 (1995) 3392.
- (1995) Phys. Rev. Lett. , vol.74 , pp. 3392
- Huang, Y.M.¹ Spence, J.C.H.² Sankey, O.F.³

110
- 0000898643
- S. Öberg, P.K. Stick, R. Jones and M.I. Heggie, Phys. Rev. B, 51 (1995) 13138.
- (1995) Phys. Rev. B , vol.51 , pp. 13138
- Öberg, S.¹ Stick, P.K.² Jones, R.³ Heggie, M.I.⁴

111
- 0029389992
- L.P. Tilly, P.M. Mooney, J.O. Chu and F.K. LeGoues, Appl. Phys. Lett., 67 (1995) 2488.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2488
- Tilly, L.P.¹ Mooney, P.M.² Chu, J.O.³ LeGoues, F.K.⁴

112
- 0001157567
- J. Weber and M.I. Alonso, Phys. Rev. B, 40 (1989) 5683.
- (1989) Phys. Rev. B , vol.40 , pp. 5683
- Weber, J.¹ Alonso, M.I.²

113
- 0001002089
- K. Weronek, J. Weber. A. Höpner, F. Ernst, R. Buchner, M. Stefaniak and H. Alexander, Mater. Sci. Forum, 83-87 (1992) 1315.
- (1992) Mater. Sci. Forum , vol.83-87 , pp. 1315
- Weronek, K.¹ Weber, J.² Höpner, A.³ Ernst, F.⁴ Buchner, R.⁵ Stefaniak, M.⁶ Alexander, H.⁷

114
- 0021784155
- R. Sauer, J. Weber, J. Stolz, E.R. Weber, K.-H. Kusters and H. Alexander, Appl. Phys. A, 36 (1985) 1.
- (1985) Appl. Phys. A , vol.36 , pp. 1
- Sauer, R.¹ Weber, J.² Stolz, J.³ Weber, E.R.⁴ Kusters, K.-H.⁵ Alexander, H.⁶

115
- 0012006011
- G.S. Mitchard and T.C. McGill, Phys. Rev. B, 25 (1982) 5351.
- (1982) Phys. Rev. B , vol.25 , pp. 5351
- Mitchard, G.S.¹ McGill, T.C.²

116
- 0000830082
- J.C. Sturm, H. Manoharan, L.C. Lenchushyn, M.L.W. Thewalt, N.L. Rowell, J.-P. Noël and D.C. Houghton, Phys. Rev. Lett., 66 (1991) 1362.
- (1991) Phys. Rev. Lett. , vol.66 , pp. 1362
- Sturm, J.C.¹ Manoharan, H.² Lenchushyn, L.C.³ Thewalt, M.L.W.⁴ Rowell, N.L.⁵ Noël, J.-P.⁶ Houghton, D.C.⁷

117
- 0042317131
- J.C. Sturm, X. Xiao, P.V. Schwartz, C.W. Liu, L.C. Lenchyshyn and M.L.W. Thewalt, J. Vac. Sci. Technol., B 10 (1992) 1998.
- (1992) J. Vac. Sci. Technol., B , vol.10 , pp. 1998
- Sturm, J.C.¹ Xiao, X.² Schwartz, P.V.³ Liu, C.W.⁴ Lenchyshyn, L.C.⁵ Thewalt, M.L.W.⁶

118
- 0001874227
- G. Bremond, A. Souifi, T. Benyattou and D. Dutartre, Thin Solid Films, 222 (1992) 60.
- (1992) Thin Solid Films , vol.222 , pp. 60
- Bremond, G.¹ Souifi, A.² Benyattou, T.³ Dutartre, D.⁴

119
- 0008149280
- K. Terashima, T. Ikarashi, D. Tweet, K. Miyanaga, T. Tatsumi and M. Tajima, Appl. Phys. Lett., 65 (1994) 601.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 601
- Terashima, K.¹ Ikarashi, T.² Tweet, D.³ Miyanaga, K.⁴ Tatsumi, T.⁵ Tajima, M.⁶

120
- 0040210590
- P.O. Hansson, J.H. Werner, L. Tapfer, L.P. Tilly and E. Bauser, J. Appl. Phys., 68 (1990) 2158.
- (1990) J. Appl. Phys. , vol.68 , pp. 2158
- Hansson, P.O.¹ Werner, J.H.² Tapfer, L.³ Tilly, L.P.⁴ Bauser, E.⁵

121
- 0027539977
- V. Higgs, E.C. Lightowlers, E.A. Fitzgerald, Y.H. Xie and P.J. Silverman, J. Appl. Phys., 73 (1993) 1952.
- (1993) J. Appl. Phys. , vol.73 , pp. 1952
- Higgs, V.¹ Lightowlers, E.C.² Fitzgerald, E.A.³ Xie, Y.H.⁴ Silverman, P.J.⁵

122
- 0026961909
- J. Michel, E.A. Fitzgerald, Y.-H. Xie, P.J. Silverman, M. Morse and L.C. Kimerling, J. Electron. Mater., 21 (1992) 1099.
- (1992) J. Electron. Mater. , vol.21 , pp. 1099
- Michel, J.¹ Fitzgerald, E.A.² Xie, Y.-H.³ Silverman, P.J.⁴ Morse, M.⁵ Kimerling, L.C.⁶

123
- 0010478742
- A. Souifi, G. Bremond, T. Benyattou, G. Guillot, D. Dutartre and I, Berbezier, J. Vac. Sci. Technol. B, 10 (1992) 2002.
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 2002
- Souifi, A.¹ Bremond, G.² Benyattou, T.³ Guillot, G.⁴ Dutartre, D.⁵ Berbezier, I.⁶

124
- 4243936014
- H.B. Erzgräber, G. Kissinger, G. Morganstern and Th. Morganstern, Solid State Phen., 47-48 (1996) 529.
- (1996) Solid State Phen. , vol.47-48 , pp. 529
- Erzgräber, H.B.¹ Kissinger, G.² Morganstern, G.³ Morganstern, Th.⁴

125
- 0000951719
- V. Higgs, E.C. Lightowlers, C.E. Norman and P. Knightley, Mater. Sci. Forum, 83-87 (1992) 1309.
- (1992) Mater. Sci. Forum , vol.83-87 , pp. 1309
- Higgs, V.¹ Lightowlers, E.C.² Norman, C.E.³ Knightley, P.⁴

126
- 0025440762
- V. Nagesh, H.G. Grimmeiss, E.-L. Heliqvist, K.L. Ljutovich and A.S. Ljutovich, Semicond. Sci. Technol., 5 (1990) 566.
- (1990) Semicond. Sci. Technol. , vol.5 , pp. 566
- Nagesh, V.¹ Grimmeiss, H.G.² Heliqvist, E.-L.³ Ljutovich, K.L.⁴ Ljutovich, A.S.⁵

127
- 0000501510
- P.N. Grillot, S.A. Ringel, E.A. Fitzgerald, D.P. Watson and Y.H. Xie, J. Appl. Phys., 77 (1995) 3248.
- (1995) J. Appl. Phys. , vol.77 , pp. 3248
- Grillot, P.N.¹ Ringel, S.A.² Fitzgerald, E.A.³ Watson, D.P.⁴ Xie, Y.H.⁵

128
- 0001153415
- P.N. Grillot, S.A. Ringel, E.A. Fitzgerald, G.P. Watson and Y.H. Xie, J. Appl. Phys., 77 (1995) 676.
- (1995) J. Appl. Phys. , vol.77 , pp. 676
- Grillot, P.N.¹ Ringel, S.A.² Fitzgerald, E.A.³ Watson, G.P.⁴ Xie, Y.H.⁵

129
- 0028602443
- W. Staiger, G. Pfeiffer, K. Weronek, A. Höpner and J. Weber, Mater. Sci. Forum, 143-147 (1994) 1571.
- (1994) Mater. Sci. Forum , vol.143-147 , pp. 1571
- Staiger, W.¹ Pfeiffer, G.² Weronek, K.³ Höpner, A.⁴ Weber, J.⁵

130
- 0001963245
- L.C. Kimerling and J.R. Patel, Appl. Phys. Lett., 34 (1979) 73.
- (1979) Appl. Phys. Lett. , vol.34 , pp. 73
- Kimerling, L.C.¹ Patel, J.R.²

131
- 0003140644
- L.C. Kimerling, J.R. Patel, J.L. Benton and P.E. Freeland, Inst. Phys. Conf. Ser., 59 (1981) 401.
- (1981) Inst. Phys. Conf. Ser. , vol.59 , pp. 401
- Kimerling, L.C.¹ Patel, J.R.² Benton, J.L.³ Freeland, P.E.⁴

132
- 0042818248
- J.C. Brighten, I.D. Hawkins, A.R. Peaker, R.A. Kubiak, E.H.C. Parker and T.E. Wall, J. Appl. Phys., 76 (1994) 4237.
- (1994) J. Appl. Phys. , vol.76 , pp. 4237
- Brighten, J.C.¹ Hawkins, I.D.² Peaker, A.R.³ Kubiak, R.A.⁴ Parker, E.H.C.⁵ Wall, T.E.⁶

133
- 0028262086
- P. Bhattacharya, S.-H. Li, J. Lee and S. Smith, Mater. Res. Soc. Symp. Proc., 325 (1994) 147.
- (1994) Mater. Res. Soc. Symp. Proc. , vol.325 , pp. 147
- Bhattacharya, P.¹ Li, S.-H.² Lee, J.³ Smith, S.⁴

134
- 0042818247
- submitted
- P.M. Mooney, L.P. Tilly, C.P. D'Emic, J.O. Chu and F. Cardone, J. Appl. Phys., submitted.
- J. Appl. Phys.
- Mooney, P.M.¹ Tilly, L.P.² D'Emic, C.P.³ Chu, J.O.⁴ Cardone, F.⁵

135
- 0040153542
- P. Omling, E.R. Weber, L. Montelius, H. Alexander and J. Michel, Phys. Rev. B, 32 (1985) 6571.
- (1985) Phys. Rev. B , vol.32 , pp. 6571
- Omling, P.¹ Weber, E.R.² Montelius, L.³ Alexander, H.⁴ Michel, J.⁵

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