Information transfer capability and signal processing performance of modern scanning electron microscopes

Microscopy and Microanalysis

Volumn 9, Issue SUPPL. 2, 2003, Pages 762-763

  Radi, Zsolt ^a   Vladár, András E ^a   Postek, Michael T ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041419730     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/s143192760344381x     Document Type: Conference Paper

References (4)

1. Contribution of the National Institute of Standards and Technology (NIST), not subject to copyright.
2. L. Reimer, Image Formation in Low-voltage Scanning Electron Microscopy, SPIE Optical Engineering Press, Bellingham, 1993.
3. D.C. Joy, Current State of Defect Review by Electron Beam Tools: A White Paper, International SEMATECH Technology Transfer Document #00013877A-ENG, Austin, 2000.
4. This research was partially supported by the International SEMATECH and the NIST OMP.