Artificial SEM images for testing resolution-measurement methods

Microscopy and Microanalysis

Volumn 14, Issue SUPPL. 2, 2008, Pages 910-911

  Cizmar, P ^a   Vladar A E ^a   Ming, B ^a   Postek, M T ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 49549088554     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927608087692     Document Type: Conference Paper

References (2)

1. M.T. Postek et al., Scanning 24 (4): 179-185 (2002)
2. J.S. Villarrubia et al., Proc. SPIE 5375, 199 (2004)