Advances in modeling of scanning charged-particle-microscopy images

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7729, Issue , 2010, Pages

  Cizmar, Petr ^a   Vladár, András E ^a   Postek, Michael T ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APRIORI; ARBITRARY SAMPLES; ARTIFICIAL IMAGE; CORRECTED IMAGE; DRIFT FUNCTIONS; MICROSCOPY IMAGES; PUBLIC DOMAINS; SCANNING ELECTRON MICROSCOPES; SCANNING ION MICROSCOPES; SEM IMAGE;

CHARGED PARTICLES; COMPUTER PROGRAMMING; COMPUTER SOFTWARE SELECTION AND EVALUATION; FUZZY CONTROL; MICROSCOPES; SCANNING ELECTRON MICROSCOPY;

SCANNING;

EID: 77954514950     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.861064     Document Type: Conference Paper

References (8)

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2. G. E. P. Box and M. E. Muller, "A Note on the Generation of Random Normal Deviates," Annals of Mathematical Statistics 29(2), pp. 610-611, 1958.
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4. P. Cizmar, A. E. Vladar, B. Ming, and M. T. Postek, "Simulated SEM Images for Resolution Measurement," Scanning 30, pp. 381-391, Sep-Oct 2008.
5. P. Cizmar, A. E. Vladar, and M. T. Postek, "Optimization of accurate sem imaging by use of artificial images," Scanning Microscopy 2009 7378(1), p. 737815, SPIE, 2009.
6. R. Ierusalimschy, L. H. de Figueiredo, and W. Celes, Lua 5.1 Reference Manual, Lua.org, 2006.
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8. P. Cizmar, A. E. Vladar, and M. T. Postek, "Real-Time Image Composition with Correction of Drift Distortion," ArXiv e-prints , Oct. 2009.