Effects of the structural layer in MEMS substrates on mechanical and electrical properties of Pb(Zr0.52Ti0.48)O3 films

Ceramics International

Volumn 37, Issue 7, 2011, Pages 2821-2828

  Liu, Dan ^a   Zhou, Bo ^a   Yoon, Sang H ^a   Wikle III, Howard C ^a   Wang, Yaqi ^b   Park, Minseo ^b   Prorok, Barton C ^a   Kim, Dong Joo ^a  

^a AUBURN UNIVERSITY   (United States)

^b AUBURN UNIVERSITY   (United States)

Author keywords

C. Electrical properties; C. Mechanical properties; D. PZT; E. Substrates

Indexed keywords

C. ELECTRICAL PROPERTIES; C. MECHANICAL PROPERTIES; E. SUBSTRATES; FILM HARDNESS; HARDNESS VALUES; INDENTATION DEPTH; INDENTATION MODULUS; MECHANICAL AND ELECTRICAL PROPERTIES; MEMS APPLICATIONS; MULTILAYER STRUCTURES; PLATINIZED SILICON SUBSTRATES; PZT; PZT FILM; STRUCTURAL LAYERS; SUBSTRATE EFFECTS; SUBSTRATE TYPES;

DIELECTRIC PROPERTIES; FERROELECTRIC FILMS; HARDNESS; LEAD; MULTILAYERS; NANOINDENTATION; RAMAN SPECTROSCOPY; SILICON NITRIDE; SILICON OXIDES; SOL-GEL PROCESS; STRUCTURAL PROPERTIES; TITANIUM NITRIDE; ZIRCONIUM;

SUBSTRATES;

EID: 79960331017     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2011.04.125     Document Type: Article

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