Influence of substrates on the elastic reaction of films for the microindentation tests

Thin Solid Films

Volumn 283, Issue 1-2, 1996, Pages 12-16

  Kim, Min Tae ^a  

^a Kia Motors Corporation   (South Korea)

Author keywords

Elastic properties; Plasma processing and deposition; Silicon oxide

Indexed keywords

CALCULATIONS; CHEMICAL REACTIONS; DEPOSITION; ELASTIC MODULI; ELASTICITY; HARDNESS; NUMERICAL METHODS; PLASMA APPLICATIONS; PLASTIC DEFORMATION; SILICA; SILICON WAFERS; SUBSTRATES;

ELASTIC DEFORMATION; LOAD AND DEPTH SENSING MICROHARDNESS TESTER; MICROINDENTATION TESTS; THERMALLY GROWN SILICON OXIDE;

THIN FILMS;

EID: 0030233248     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08498-3     Document Type: Article

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