Mechanical deformation of PZT thin films for MEMS applications

Materials Science and Engineering: A

Volumn 259, Issue 1, 1999, Pages 126-131

  Bahr, D F ^a   Robach, J S ^b   Wright, J S ^b   Francis, L F ^b   Gerberich, W W ^b  

^a Washington State University   (United States)

^b UNIVERSITY OF MINNESOTA   (United States)

Author keywords

Indentation; PZT; Thin films

Indexed keywords

ELASTIC MODULI; FRACTURE; HARDNESS; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; PLASTIC DEFORMATION;

CONTINUOUS INDENTATION METHODS; LEAD ZIRCONATE TITANATE THIN FILMS;

THIN FILMS;

EID: 0000652746     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(98)00868-5     Document Type: Article

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