Characterization of mechanical properties of PZT thin film by nanoindentation

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 56-60

  Xu, X H ^a   Gu, P ^a   Jiang, R ^a   Zhao, G ^a   Wen, L ^a   Chu, J R ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Mechanical properties; Nanoindentation; PZT

Indexed keywords

ANNEALING; COLLOIDS; GELATION; GELS; LEAD; MOLECULES; NANOINDENTATION; NEMS; PHOTOACOUSTIC EFFECT; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING LEAD COMPOUNDS; SOL-GEL PROCESS; SOL-GELS; SOLIDS; SOLS; THICK FILMS; THIN FILM DEVICES; THIN FILMS; VAPOR DEPOSITION;

(PL) PROPERTIES; ANNEALING TIME; INDENTATION DEPTHS; INTERNATIONAL CONFERENCES; LEAD ZIRCONATE TITANATE (PZT) THIN FILMS; MICRO SENSORS; MOLECULAR SYSTEMS; NANOINDENTATION METHODS; PROCESSING PARAMETERS; PZT THIN FILMS; SOL - GEL; SUBSTRATE EFFECTS;

MECHANICAL PROPERTIES;

EID: 46149097426     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334621     Document Type: Conference Paper

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