Residual stress effects on piezoelectric response of sol-gel derived lead zirconate titanate thin films

Journal of Applied Physics

Volumn 101, Issue 2, 2007, Pages

  Berfield, T A ^a   Ong, R J ^c   Payne, D A ^c   Sottos, N R ^a,b  

^a University of Illinois at Urbana Champaign   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

FIELD INDUCED STRAINS; LEAD ZIRCONATE TITANATE; STRAIN FIELD RESPONSE; WAFER CURVATURE MEASUREMENTS;

PIEZOELECTRICITY; RESIDUAL STRESSES; SEMICONDUCTING LEAD COMPOUNDS; SOL-GEL PROCESS; SUBSTRATES; TENSILE STRESS;

THIN FILMS;

EID: 33847707344     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2422778     Document Type: Article

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