Experimental, analytical, and finite element analyses of nanoindentation of multilayer PZT/Pt/SiO2 thin film systems on silicon wafers

Journal of Materials Research

Volumn 21, Issue 2, 2006, Pages 409-419

  Chima Okereke, C ^a   Bushby, A J ^a   Reece, M J ^a   Whatmore, R W ^b   Zhang, Q ^b  

^a QUEEN MARY UNIVERSITY OF LONDON   (United Kingdom)

^b CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; FINITE ELEMENT METHOD; INDENTATION; LEAD COMPOUNDS; MATHEMATICAL MODELS; MECHANICAL PROPERTIES; MICROELECTROMECHANICAL DEVICES; MULTILAYERS; PLATINUM; SILICA; SILICON WAFERS;

ELASTIC PROPERTIES; LEAD ZIRCONATE TITANATE (PZT) MULTILAYER SYSTEMS; NANOINDENTATION;

THIN FILMS;

EID: 33644548326     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2006.0047     Document Type: Article

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