Determination of non-maxwellian electron energy distributions in low-pressure plasmas by using the optical emission spectroscopy and a collisional-radiative model

Plasma Science and Technology

Volumn 13, Issue 3, 2011, Pages 267-278

  Zhu, Ximing ^a   Pu, Yikang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

collisional radiative model; non Maxwellian EEDF; optical emission spectroscopy; plasma diagnostics

Indexed keywords

COLLISIONAL RADIATIVE MODEL; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ELECTRON ENERGY DISTRIBUTIONS; ELECTRON HEATING; ENERGY LOSS; EXCITED ATOMS; KINETIC PROCESS; KRYPTON ATOMS; LINE RATIO METHOD; LOW PRESSURE PLASMA; LOW TEMPERATURE PLASMAS; NON-MAXWELLIAN EEDF; NONLOCAL; OPTICAL EMISSIONS; REACTIVE GAS; TWO-TEMPERATURE;

ARGON; ATOMIC SPECTROSCOPY; DISSOCIATION; DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRIC POWER DISTRIBUTION; ELECTRON ENERGY ANALYZERS; ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON TEMPERATURE; ELECTRONS; EMISSION SPECTROSCOPY; ENERGY DISSIPATION; KRYPTON; LIGHT EMISSION; OPTICAL EMISSION SPECTROSCOPY; PLASMA DIAGNOSTICS; SENSITIVITY ANALYSIS;

COLLISIONAL PLASMAS;

EID: 79959400458     PISSN: 10090630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-0630/13/3/02     Document Type: Article

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