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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 5, 2009, Pages 1159-1165

Measurement of electron temperatures and electron energy distribution functions in dual frequency capacitively coupled CF4 / O2 plasmas using trace rare gases optical emission spectroscopy

(6) Chen, Zhiying a Donnelly, Vincent M a Economou, Demetre J a Chen, Lee b Funk, Merritt b Sundararajan, Radha b

a UNIVERSITY OF HOUSTON (United States)

b TOKYO ELECTRON AMERICA INC (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOTTOM ELECTRODES; CAPACITIVELY COUPLED; DUAL FREQUENCY; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; HIGH ENERGY TAILS; HIGH FREQUENCY; LOW FREQUENCY; PARALLEL PLATES; RARE GAS; RF-POWER; TRACE RARE GASES OPTICAL EMISSION SPECTROSCOPIES;

DISSOCIATION; DISTRIBUTION FUNCTIONS; ELECTRIC POWER DISTRIBUTION; ELECTRON ENERGY ANALYZERS; ELECTRON ENERGY LEVELS; ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; INERT GASES; ION BEAMS; LEAKAGE (FLUID); LIGHT EMISSION; OPTICAL EMISSION SPECTROSCOPY; PHOTORESISTS;

INTEGRATED OPTOELECTRONICS;

EID: 70349124547 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3179162 Document Type: Article

Times cited : (35)

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