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Volumn 15, Issue 1, 2001, Pages 49-56
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Comparative determination of the electron temperature in Ar- and N2-plasmas with electrostatic probes, optical emission spectroscopy OES and energy dispersive mass spectrometry EDMS
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
ELECTRIC DISCHARGES;
ELECTRON CYCLOTRON RESONANCE;
ELECTRONS;
ELECTROSTATICS;
EMISSION SPECTROSCOPY;
MASS SPECTROMETRY;
NITROGEN;
NUMERICAL METHODS;
PRESSURE;
TEMPERATURE;
CHARGE CARRIER BALANCE EQUATION;
ELECTRON CYCLOTRON WAVE RESONANCE;
ELECTRON TEMPERATURE;
ELECTROSTATIC PROBE;
ENERGY DISPERSIVE MASS SPECTROMETRY;
OPTICAL EMISSION SPECTROSCOPY;
PLASMA DIAGNOSTICS;
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EID: 0035397150
PISSN: 12860042
EISSN: None
Source Type: Journal
DOI: 10.1051/epjap:2001166 Document Type: Article |
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Times cited : (29)
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References (20)
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