Thomson-scattering observation of non-Maxwellian electron energy distribution in inductively coupled C 4F 8/Ar and CF 4/Ar plasmas and the effect of vibrational excitation and nonlocal electron kinetics

Journal of Applied Physics

Volumn 92, Issue 4, 2002, Pages 1757-1763

  Kono, A ^a   Funahashi, H ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ELECTRON ENERGY DISTRIBUTIONS; ELECTRON ENERGY LOSS; ELECTRON KINETICS; INDUCTIVELY-COUPLED; LASER INDUCED EFFECT; LOCALIZED ELECTRONS; MAJOR FACTORS; MONTE CARLO SIMULATION; NONLOCAL; THOMSON; VIBRATIONAL EXCITATION;

DISSOCIATION; ELECTROMAGNETIC INDUCTION; ELECTRON ENERGY ANALYZERS; ENERGY DISSIPATION; EXCITED STATES; LASER DIAGNOSTICS; MONTE CARLO METHODS;

ARGON LASERS;

EID: 0037103656     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1493659     Document Type: Article

References (22)

1. M. V. Malyshev and V. M. Donnelly, J. Vac. Sci. Technol. A 15, 550 (1997). jva JVTAD6 0734-2101
2. M. V. Malyshev and V. M. Donnelly, Phys. Rev. E 60, 6016 (1999). pre PLEEE8 1063-651X
3. M. D. Bowden, Y. Goto, H. Yanaga, P. J. A. Hawarth, K. Uchino, and K. Muraoka, Plasma Sources Sci. Technol. 8, 203 (1999). pst PSTEEU 0963-0252
4. S. A. Moshkalyov, C. Thompson, T. Morrow, and W. G. Graham, J. Vac. Sci. Technol. A 18, 1395 (2000). jva JVTAD6 0734-2101
5. L. P. Bakker, J. M. Freriks, F. J. de Hoog, and G. M. W. Kroesen, Rev. Sci. Instrum. 71, 2007 (2000). rsi RSINAK 0034-6748
6. A. Kono and K. Nakatani, Rev. Sci. Instrum. 71, 2716 (2000). rsi RSINAK 0034-6748
7. A. Kono, T. Sugiyama, T. Goto, H. Furuhashi, and Y. Uchida, Jpn. J. Appl. Phys. 40, L238 (2001). jjc JAPLD8 0021-4922
8. J. Ohono, H. Funahashi, and A. Kono, Proceedings 25th International Conference on Phenomena in Ionized Gases (Nagoya, 2001) Vol. 4, p. 225.
9. C. M. Penney, R. L. St. Peters, and M. Lapp, J. Opt. Soc. Am. 64, 712 (1974). jox JOSAAH 0030-3941
10. G. Herzberg, Molecular Spectra & Molecular Structure I. Spectra of Diatomic Molecules 2nd ed. (Van Nostrand, New York, 1950).
11. A. Kono, M. Konishi, and K. Kato, Thin Solid Films 407, 198 (2002). tsf THSFAP 0040-6090
12. B. M. Smirnov, Negative Ions (McGraw-Hill, New York, 1982).
13. J. H. Rechardson, L. M. Stephenson, and J. I. Brauman, Chem. Phys. Lett. 30, 17 (1975). cph CHPLBC 0009-2614
14. V. A. Godyak and V. I. Kolobov, Phys. Rev. Lett. 81, 369 (1998). prl PRLTAO 0031-9007
15. M. D. Bowden, R. Tabata, P. Suanpoot, K. Uchino, and K. Muraoka, J. Appl. Phys. 90, 2158 (2001). jap JAPIAU 0021-8979
16. V. Vahedi, Thesis, University of California, Berkeley (1993), as quoted by M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994), p. 73.
17. A. V. Bobylev and K. Nanbu, Phys. Rev. E 61, 4576 (2000). pre PLEEE8 1063-651X
18. A. Kono and K. Kato, Appl. Phys. Lett. 77, 495 (2000). apl APPLAB 0003-6951
19. H. Itoh, T. Miyachi, M. Kawaguchi, Y. Nakano, and H. Tagashira, J. Appl. Phys., J. Phys. D 24, 277 (1991). jpd JPAPBE 0022-3727
20. L. G. Christophorou, J. K. Olthof, and M. V. V. S. Rao, J. Phys. Chem. Ref. Data 25, 1341 (1996). jpr JPCRBU 0047-2689
21. L. G. Christophorou and J. K. Olthoff, J. Phys. Chem. Ref. Data 28, 967 (1999). jpr JPCRBU 0047-2689
22. A. Kono, Appl. Surf. Sci. 192, 115 (2002). asu ASUSEE 0169-4332