Gas temperature, electron density and electron temperature measurement in a microwave excited microplasma

Journal of Physics D: Applied Physics

Volumn 41, Issue 10, 2008, Pages

  Zhu, Xi Ming ^a   Chen, Wen Cong ^a   Pu, Yi Kang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATMOSPHERIC PRESSURE; CARRIER CONCENTRATION; MATHEMATICAL MODELS; OPTICAL EMISSION SPECTROSCOPY; RESONATORS;

COLLISIONAL-RADIATIVE MODELS; GAS TEMPERATURE; MICROPLASMAS; SPLIT-RING RESONATORS;

PLASMAS;

EID: 43349099804     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/10/105212     Document Type: Article

References (38)

1. Iza F and Hopwood J A 2003 Low-power microwave plasma source based on a microstrip split-ring resonator IEEE Trans. Plasma Sci. 31 782
2. Iza F and Hopwood J A 2004 Rotational, vibrational, and excitation temperatures of a microwave-frequency microplasma IEEE Trans. Plasma Sci. 32 498
3. Iza F and Hopwood J A 2005 Split-ring resonator microplasma: microwave model, plasma impedance and power efficiency Plasma Sources Sci. Technol. 14 397
4. Hopwood J A, Iza F, Coy S and Fenner D B 2005 A microfabricated atmospheric-pressure microplasma source operating in air J. Phys. D: Appl. Phys. 38 1698
5. Iza F and Hopwood J A 2005 Self-organized filaments, striations and other nonuniformities in nonthermal atmospheric microwave excited microdischarges IEEE Trans. Plasma Sci. 33 306
6. Luque J and Crosley D R 1999 LIFBASE: Database and spectral simulation (version 1.5) SRI International Report MP 99-009
7. 2 and molecular spectra emitted from atmospheric plasmas Spectrochim. Acta Part B 58 249
8. Choe W 2007 private communication
9. 2 plasmas and the ambient air effect on the plasma Phys. Plasmas 13 103503
10. Mariotti D, Shimizu Y, Sasaki T and Koshizaki N 2007 Gas temperature and electron temperature measurements by emission spectroscopy for an atmospheric microplasma J. Appl. Phys. 101 013307
11. Zhu X M and Pu Y K 2007 Comparison between low-pressure and atmospheric-pressure discharges: basic parameters in argon unpublished
12. Wang Q, Koleva I, Donnelly V M and Economou D J 2005 Spatially resolved diagnostics of an atmospheric pressure direct current helium microplasma J. Phys. D: Appl. Phys. 38 1690
13. Balcon N, Aanesland A and Boswell R 2007 Pulsed rf discharges, glow and filamentary mode at atmospheric pressure in argon Plasma Sources Sci. Technol. 16 217
14. Torres J, Palomares J M, Sola A, v d Mullen J J A M and Gamero A 2007 A Stark broadening method to determine simultaneously the electron temperature and density in high-pressure microwave plasmas J. Phys. D: Appl. Phys. 40 5929
15. Gigosos M A, González M Á and Cardeñoso V 2003 Computer simulated Balmer-alpha, -beta and -gamma Stark line profiles for non-equilibrium plasmas diagnostics Spectrochim. Acta B 58 1489
16. Vlek J 1989 A collisional-radiative model applicable to argon discharges over a wide range of conditions. I: Formulation and basic data J. Phys. D: Appl. Phys. 22 623
17. Bultel A, van Ootegem B, Bourdon A and Vervisch P 2002 Influence of in an argon collisional-radiative model Phys. Rev. E 65 046406
18. Bogaerts A, Gijbels R and Vlek J 1998 Collisional-radiative model for an argon glow discharge J. Appl. Phys. 84 121
19. Kano K, Suzuki M and Akatsuka H 2000 Spectroscopic measurement of electron temperature and density in argon plasmas based on collisional-radiative model Plasma Sources Sci. Technol. 9 314
20. Sáinz A, Margot J, Garcia M C and Calzada M D 2005 Role of dissociative recombination in the excitation kinetics of an argon microwave plasma at atmospheric pressure J. Appl. Phys. 97 113305
21. Yanguas-Gil A, Cotrino J and González-Elipe A R 2006 Measuring the electron temperature by optical emission spectroscopy in two temperature plasmas at atmospheric pressure: a critical approach J. Appl. Phys. 99 033104
22. Zhu X M and Pu Y K 2007 A simple collisional-radiative model for low-pressure argon-oxygen mixture discharges J. Phys. D: Appl. Phys. 40 5202
23. Zhu X M and Pu Y K 2007 A simple collisional-radiative model for low-pressure argon discharges J. Phys. D: Appl. Phys. 40 2533
24. Akatsuka H, Yuji T, Urayama T, Raju R and Fujii S 2007 Estimation of electron temperature of non-equilibrium argon plasma of atmospheric pressure by OES measurement 3rd Int. Congress on Cold Atmospheric Pressure Plasmas (Belgium)
25. Akatsuka H 2007 private communication
26. d Vries N, Iordanova E, Hartgers A, v Veldhuizen E M, v d Donker M J and v d Mullen J J A M 2006 A spectroscopic method to determine the electron temperature of an argon surface wave sustained plasmas using a collision radiative model J. Phys. D: Appl. Phys. 39 4194
27. NIST 2006 Atomic Spectra Database http://physics.nist.gov/PhysRefData/ ASD/index.html
28. 54s) metastable states of argon Phys. Rev. A 59 R2552
29. 5np (n = 5,6,7) levels Phys. Rev. A 68 032719
30. 54s configuration: differential cross-sections and cross-section ratios J. Phys. B: At. Mol. Opt. Phys. 37 247
31. Zatsarinny O and Bartschat K 2006 B-spline calculations of oscillator strengths in neutral argon J. Phys. B: At. Mol. Opt. Phys. 39 2145
32. 55p levels from the metastable levels of Ar Phys. Rev. A 75 052707
33. 54s metastable states Phys. Rev. A 76 024701
34. 2) atoms with 22 reagent gases J. Chem. Phys. 115 3144
35. 2) atoms with water vapor: excitation functions for electronic quenching collisions J. Phys. Chem. B 106 8142
36. Pencheva M, Petrov G, Petrova T and Benova E 2004 A collisional-radiative model of an argon surface-wave-sustained plasma at atmospheric pressure Vacuum 76 409
37. Sadeghi N, Aubert X, Boeuf J P, Lagrange J F, Pitchford L and Rousseau A 2007 Experimental and numerical study of an argon microhollow cathode plasma 18th Int. Symp. on Plasma Chemistry (Japan)
38. Kabouzi Y, Graves D B, Castaños-Martínez E and Moisan M 2007 Modeling of atmospheric-pressure plasma columns sustained by surface waves Phys. Rev. E 75 016402