Space-averaged kinetic analysis of stochastically heated electropositive and electronegative rf capacitive discharges

Plasma Sources Science and Technology

Volumn 8, Issue 1, 1999, Pages 151-161

  Wang, Zuoding ^a   Lichtenberg, Allan J ^a   Cohen, Ronald H ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ARGON; DIFFUSION; ELECTRIC DISCHARGES; ELECTRON ENERGY LEVELS; FUNCTIONS; KINETIC THEORY; MATHEMATICAL MODELS; OXYGEN; PLASMA HEATING; PROBABILITY;

ELECTRON ENERGY PROBABILITY FUNCTION (EEPF); KINETIC EQUATION; PLASMA DISCHARGES; STOCHASTIC SHEATH HEATING;

PLASMAS;

EID: 0033075057     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/8/1/018     Document Type: Article

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