Accelerated reliability testing of highly aligned single-walled carbon nanotube networks subjected to DC electrical stressing

Nanotechnology

Volumn 22, Issue 26, 2011, Pages

  Strus, Mark C ^a   Chiaramonti, Ann N ^a   Kim, Young Lae ^b   Jung, Yung Joon ^b   Keller, Robert R ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b Northeastern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNED SINGLE-WALLED CARBON NANOTUBES; DC ELECTRICAL; DEGRADATION RATE; DEVICE LIFETIME; ELECTRICAL RELIABILITY; ELECTRICAL STRESS; EMPIRICAL METHOD; FLUIDIC ASSEMBLY; INITIAL RESISTANCE; LONG TERM PERFORMANCE; METALLIC INTERCONNECTS; NANO SCALE; PHYSICAL MECHANISM; RELIABILITY TESTING; SCANNING ELECTRONS; TEMPLATE-BASED; TEST METHOD;

DC POWER TRANSMISSION; DEGRADATION; FABRICATION; TRANSMISSION ELECTRON MICROSCOPY;

SINGLE-WALLED CARBON NANOTUBES (SWCN);

EID: 79957823011     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/26/265713     Document Type: Article

References (71)

1. Kasumov A Yu, Deblock R, Kociak M, Reulet B, Bouchiat H, Khodos I I, Gorbatov Yu B, Volkov V T, Journet C and Burghard M 1999 Supercurrents through single-walled carbon nanotubes Science 284 1508-11 (Pubitemid 29291393)
2. Hone J, Whitney M, Piskoti C and Zettl A 1999 Thermal conductivity of single-walled carbon nanotubes Phys. Rev. B 59 R2514-6
3. Kim P, Shi L, Majumdar A and McEuen P L 2001 Thermal transport measurements of individual multiwalled nanotubes Phys. Rev. Lett. 87 215502
4. Baughman R H, Zakhibov A A and de Heer W A 2002 Carbon nanotubes-the route toward applications Science 297 787-92 (Pubitemid 34845917)
5. Cao Q and Rogers J A 2009 Ultrathin films of single-walled carbon nanotubes for electronics and sensors: a review of fundamental and applied aspects Adv. Mater. 21 29-53
6. Biercuk M J, Ilani S, Marcus C M and McEuen P L 2008 Electrical transport in single-wall carbon nanotubes Carbon Nanotubes (Advanced Topics in the Synthesis, Structure, Properties and Applications) ed A Jorio, G Dresselhaus and M S Dresselhaus (Berlin: Springer)
7. Graham A P, et al. 2005 How do carbon nanotubes fit into the semiconductor roadmap? Appl. Phys. A 80 1141-51 (Pubitemid 40454131)
8. Purewal M S, Hong B H, Ravi A, Chandra B, Hone J and Kim P 2007 Scaling of resistance and electron mean free path of single-walled carbon nanotubes Phys. Rev. Lett. 98 186808
9. Mann D, Javey A, Kong J, Wang Q and Dai H 2003 Ballistic transport in metallic nanotubes with reliable Pd ohmic contacts Nano Lett. 3 1541-4 (Pubitemid 37518167)
10. Wei B Q, Vajtai R and Ajayan P M 2001 Reliability and current carrying capacity of carbon nanotubes Appl. Phys. Lett. 79 1172-5
11. Cassell A M and Li J 2007 Carbon nanotube based interconnect technology: opportunities and challenges Micro-and Opto-Electronic Materials and Structures: Physics, Mechanics, Design, Reliability, Packaging ed E Suhir, C P Wong and Y C Lee (New York: Springer)
12. International technology roadmap for semiconductors 2009 (Semiconductor Industry Association, San Jose, CA) http://public.itrs.net
13. Ting J-H, Chiu C-C and Huang F-Y 2009 Carbon nanotube array vias for interconnect applications J. Vac. Sci. Technol. B 27 1086-92
14. Coiffic J C, Fayolle M, Maitrejean S, Foa Torres L E F and Ponche H L 2007 Conduction regime in innovative carbon nanotube via interconnect Appl. Phys. Lett. 91 252107
15. Kreupl F, Graham A P, Liebau M, Duesber G S, Seidel R and Unger E 2004 Carbon nanotubes for interconnect applications IEEE Int. Electron Devices Mtg pp683-6 (Pubitemid 40928385)
16. Park C, Ounaies Z, Watson K A, Crooks R E, Smith J Jr, Lowther S E, Connell J W, Siochi E J, Harrison J S and Clair T L St 2002 Dispersion of single wall carbon nanotubes by insitu polymerization under sonication. Chem. Phys. Lett. 364 303-8
17. Wu Z, et al. 2004 Transparent, conductive carbon nanotube films Science 305 1273-6 (Pubitemid 39129228)
18. Shiraishi M and Ata M 2002 Conduction mechanisms in single-walled carbon nanotubes Synth. Mat. 128 235-9 (Pubitemid 34466877)
19. Falvo M R, Clary G J, Taylor R M II, Chi V, Brooks F P Jr, Washburn S and Superfine R 1997 Bending and buckling of carbon nanotubes under large strain Nature 389 582-4 (Pubitemid 27446170)
20. Kang S J, Kocabas C, Ozel T, Shim M, Pimparkar N, Alam M A, Rotkin S V and Rogers J A 2007 High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes Nat. Nanotechnol. 2 230-6 (Pubitemid 46739814)
21. LeMieux M C, Sok S, Roberts M E, Opatkiewicz J P, Liu D, Barman S N, Patil N, Mitra S and Bao Z 2009 Solution assembly of organized carbon nanotube networks for thin-film transistors ACS Nano 3 4089-97
22. Ishikawa F N, Chang H-K, Ryu K, Chen P-C, Badmaev A, Gomez De Arco L, Shen G and Zhou C 2009 Transparent electronics based on transfer printed aligned carbon nanotubes on rigid and flexible substrates ACS Nano 3 73-9
23. Engel M, Small J P, Steiner M, Freitag M, Green A A, Hersam M C and Avouris P 2008 Thin film nanotube transistors based on self-assembled, aligned semiconducting carbon nanotube arrays ACS Nano 2 2445-52
24. Novak J P, Snow E S, Houser E J, Park D, Stepnowski J L and McGill R A 2003 Nerve agent detection using networks of single-walled carbon nanotubes Appl. Phys. Lett. 83 4026-8
25. Snow E S, Perkins F K, Houser E J, Badescu S C and Reinecke T L 2005 Chemical detection with a single-walled carbon nanotube capacitor Science 307 1942-5 (Pubitemid 40404700)
26. Bekyarova E, Davis M, Burch T, Itkis M E, Zhao B, Sunshine S and Haddon R C 2004 Chemically functionalized single-walled carbon nanotubes as ammonia sensors J. Phys. Chem. B 108 19717-20
27. Bondavalli P, Legagneux P and Pribat D 2009 Carbon nanotubes based transistors as gas sensors: state of the art and critical review Sensors Actuators B 140 304-18
28. Gruner G 2006 Carbon nanotube films for transparent and plastic electronics J. Mater. Chem. 16 3533-9 (Pubitemid 44343877)
29. Pasquier A D, Unalan H E, Kanwal A, Miller S and Chhowalla M 2005 Conducting and transparent single-wall carbon nanotube electrodes for polymer-fullerene solar cells Appl. Phys. Lett. 87 203511
30. Barnes T M, Wu X, Zhou J, Duda A, van de Lagemaat J, Coutts T J, Weeks C L, Britz D A and Glatkowski P 2007 Single-wall carbon nanotube networks as a transparent back contact in CdTe solar cells Appl. Phys. Lett. 90 243503
31. Ago H, Petritsch K, Shaffer M S P, Windle A H and Friend R H 1999 Composites of carbon nanotubes and conjugated polymers for photovoltaics devices Adv. Mater. 11 1281-5 (Pubitemid 30503310)
32. 2-based solar cells J. Phys. Chem. Lett. C 111 14045-8 (Pubitemid 47548391)
33. Tenent R C, Barnes T M, Bergeson J D, Ferguson A J, To B, Gedvilas L M, Heben M J and Blackburn J L 2009 Ultrasmooth, large-area, high-uniformity, conductive transparent single-walled-carbon-nanotube films for photovoltaics produced by ultrasonic spraying Adv. Mater. 21 3210-6
34. Bachtold A, Henny M, Terrier C, Strunk C, Schönenberger C, Salvetat J-P, Bonard J-M and Forró L 1998 Contacting carbon nanotubes selectively with low ohmic-contacts for four-probe electric measurements Appl. Phys. Lett. 73 274-6 (Pubitemid 128673750)
35. Liu Z, Jiao L, Yao Y, Xian X and Zhang J 2010 Aligned, ultralong single-walled carbon nanotubes: from synthesis, sorting, to electronic devices Adv. Mater. 22 2285-310
36. Yuzvinsky T D, Mickelson W, Aloni S, Konsek S L, Fennimore A M, Begtrup G E, Kis A, Regan B C and Zettl A 2005 Imaging the life story of nanotube devices Appl. Phys. Lett. 87 083103
37. Huang J Y, Chen S, Jo S H, Wang Z, Han D X, Chen G, Dresselhaus M S and Ren Z F 2005 Atomic-scale imaging of wall-by-wall breakdown and concurrent transport measurements in multiwall carbon nanotubes Phys. Rev. Lett. 94 236802
38. Collins P G, Hersam M, Arnold M, Martel R and Avouris Ph 2001 Current saturation and electrical breakdown in multiwalled carbon nanotubes Phys. Rev. Lett. 86 3128-31 (Pubitemid 32317878)
39. Mølhave K, Gudnason S B, Pedersen A T, Clausen C H, Horsewell A and Bøgglid P 2006 Transmission electron microscopy study of individual carbon nanotube breakdown caused by Joule heating in air Nano Lett. 6 1663-8
40. Chung J, Lee K-H, Lee J, Troya D and Schatz G C 2004 Multi-walled carbon nanotubes experiencing electrical breakdown as gas sensors Nanotechnology 15 1596-602
41. Tsutsui M, Taninouchi Y-K, Kurokowa S and Sakai A 2006 Electrical breakdown of short multiwalled carbon nanotubes J. Appl. Phys. 100 094302
42. Pop E, Mann D A, Goodson K E and Dai H 2007 Electrical and thermal transport in metallic single-wall carbon nanotubes on insulating substrates J. Appl. Phys. 101 093710
43. Lan C, Amama P B, Fisher T S and Reifenberger R G 2007 Correlating electrical resistance to growth conditions for multiwalled carbon nanotubes Appl. Phys. Lett. 91 093105
44. Chai Y, Chan P C H, Fu Y, Chuang Y C and Liu C Y 2008 Electromigration studies of Cu/carbon nanotube composite interconnect using Blech structure IEEE Electron Device Lett. 29 1001-3
45. Chai Y, Zhang M, Gong J and Chan P C H 2006 Reliability evaluation of carbon nanotube interconnect in a silicon CMOS environment Int. Conf. on Electronic Materials and Packaging (China) pp467-71
46. Jaber-Ansari L, Hahm M G, Somu S, Sanz Y E, Busnaina A and Jung Y J 2009 Mechanism of very large scale assembly of SWNTs in template guided fluidic assembly process J. Am. Chem. Soc. 131 804-8
47. Xiong X, Jaberansari L, Hahm M G, Busnaina A and Jung Y J 2007 Building highly organized single-walled-carbon-nanotube networks using template guided fluidic assembly Small 3 2006-10 (Pubitemid 350280384)
48. de Andrade M J, Lima M D, Skkalov V, Bergmann C P and Roth S 2007 Electrical properties of transparent carbon nanotube networks prepared through different techniques Phys. Status Solidi 1 178-80 (Pubitemid 351175919)
49. Bekyarova E, Itkis M E, Cabrera N, Zhao B, Yu A, Gao J and Haddon R C 2005 Electronic properties of single-walled carbon nanotube networks J. Am. Chem. Soc. 127 5990-5 (Pubitemid 40577656)
50. Blackburn J L, Barnes T M, Beard M C, Kim Y-H, Tenent R C, McDonald T J, To B, Coutts T J and Heben M J 2008 Transparent conductive single-walled carbon nanotube networks with precisely tunable ratios of semiconducting and metallic nanotubes ACS Nano 2 1266-74
51. Barnes T M, Blackburn J L, van de Lagemaat J, Coutts T J and Heben M J 2008 Reversibility, dopant desorption, and tunneling in the temperature- dependent conductivity of type-separated, conductive carbon nanotube networks ACS Nano 2 1968-76
52. Kaiser A B, Düsberg G and Roth S 1998 Heterogeneous model for conduction in carbon nanotubes Phys. Rev. B 57 1418-21 (Pubitemid 128476762)
53. Saito T, Ashihara H, Ishikawa K, Miyauchi M, Yamada Y and Nakano H 2004 A reliability study of barrier-metal-clad copper interconnects with self-aligned metallic caps IEEE Trans. Electron Devices 51 2129-34
54. Filippi R G, Wang P-C, Brendler A and Lloyd J R 2009 Correlation between a threshold failure time and void nucleation for describing the bimodal electromigration behavior of copper interconnects Appl. Phys. Lett. 95 072111
55. Tan C M, Roy A, Vairagar A V, Krishnamoorthy A and Mhaisalkar S G 2005 Current crowding effect on copper dual damascene via bottom failure for ULSI applications IEEE Trans. Device Mater. Reliab. 5 198-205 (Pubitemid 41164431)
56. Scorzoni A, Munari I D and Stulens H 1994 Non-destructive electrical techniques as a means for understanding the basic mechanisms of electromigration Mater. Res. Soc. Symp. Proc. 337 515-26
57. Rosenberg R and Berenbaum L 1968 Resistance monitoring and effects of nanoadhesion during electromigration in aluminum films Appl. Phys. Lett. 12 201-4
58. Munari I D, Scorzoni A, Tamarri F and Fantini F 1995 Activation energy in the early stage of electromigration in Al-1% Si/TiN/Ti bamboo lines Semicond. Sci. Technol. 10 255-9
59. Wei F L, Gan C L, Tan T L, Hau-Riege C S, Marathe A P, Vlassak J J and Thompson C V 2008 Electromigration-induced extrusion failures in Cu/low-k interconnects J. Appl. Phys. 104 023529
60. Hu L, Hecht D S and Gruner G 2004 Percolation in transparent and conducting carbon nanotube networks Nano Lett. 4 2513-7 (Pubitemid 40002395)
61. Topinka M A, Rowell M W, Goldhaber-Gordon D, McGehee M D, Hecht D S and Gruner G 2009 Charge transport in interpenetrating networks of semiconducting and metallic carbon nanotubes Nano Lett. 9 1866-71
62. Estrada D and Pop E 2011 Imaging dissipation and hot spots in carbon nanotube network transistors Appl. Phys. Lett. 98 073102
63. Nirmalraj P N, Lyons P E, De S, Coleman J N and Boland J J 2009 Electrical connectivity in single-walled carbon nanotube networks Nano Lett. 9 3890-5
64. Collins P G, Bradley K, Ishigami M and Zettl A 2000 Extreme oxygen sensitivity of electronic properties of carbon nanotubes Science 287 1801-4 (Pubitemid 30143962)
65. Jackson R K, Munro A, Nebesny K, Armstrong N and Graham S 2010 Evaluation of transparent carbon nanotube networks of homogeneous electronic type ACS Nano 4 1377-84
66. Zahab A, Spina L, Poncharal P and Marliére C 2000 Charge transfer and fermi level shift in p-doped single-walled carbon nanotubes Phys. Rev. B 62 10000-3
67. Salehi-Khojin A, Lin K Y, Field C R and Masel R I 2010 Nonthermal current-stimulated desorption of gases from carbon nanotubes Science 329 1327-30
68. Williams E W, Lawlor C M, Keeling A G and Gould R D 1994 Novel room temperature carbon monoxide sensor utilizing rate of change of resistance in thick films of tin oxide Int. J. Electron. 76 815-20
69. Vijayaraghavan A, Marquardt C W, Dehm S, Hennrich F and Krupke R 2010 Imaging defects and junctions in single-walled carbon nanotubes by voltage-contrast scanning electron microscopy Carbon 48 494-500
70. Stadermann M, et al. 2004 Nanoscale study of conduction through carbon nanotube networks Phys. Rev. B 69 201402(R)
71. Kim Y L, et al. 2009 Highly aligned scalable platinum-decorated single-wall carbon nanotube arrays for nanoscale electrical interconnects ACS Nano 3 2818-26