Highly aligned scalable platinum- decorated single-wall carbon nanotube arrays for nanoscale electrical interconnects

ACS Nano

Volumn 3, Issue 9, 2009, Pages 2818-2826

  Kim, Young Lae ^a   Li, Bo ^a   An, Xiaohong ^b   Hahm, Myung Gwan ^a   Chen, Li ^b   Washington, Morris ^b   Ajayan, P M ^c   Nayak, Saroj K ^b   Busnaina, Ahmed ^a   Kar, Swastik ^b   Jung, Yung Joon ^a  

^a Northeastern University   (United States)

^b Research Rensselaer Polytechnic Institute   (United States)

^c Rice University   (United States)

Author keywords

Carbon nanotubes; Fluidic assembly; Nanoscale interconnects; Pt decoration; SWNT metallization

Indexed keywords

AB INITIO; CONDUCTION CHANNEL; COPPER-BASED; DENSITY FUNCTIONAL THEORY CALCULATIONS; ELECTRICAL INTERCONNECTS; FAILURE CURRENTS; FLUIDIC ASSEMBLY; GIGASCALE INTEGRATION; NANO SCALE; NANOSCALE INTERCONNECTS; NANOTUBE ALIGNMENT; NANOTUBE INTERCONNECT; PLATINUM NANO-CLUSTER; PT DECORATION; PT NANOCLUSTERS; SI SUBSTRATES; SI-BASED; SINGLE-WALL CARBON NANOTUBES; STRUCTURE WIDTH; SWNT METALLIZATION; TEMPLATE-BASED; TEST STRUCTURE;

CARBON NANOTUBES; DENSITY FUNCTIONAL THEORY; METALLIZING; NANOCLUSTERS; NANOSTRUCTURED MATERIALS; PLATINUM; SILICON COMPOUNDS;

SINGLE-WALLED CARBON NANOTUBES (SWCN);

EID: 70349595219     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn9007753     Document Type: Article

References (27)

1. Michael, N. L.; Kim, C. U.; Gillespie, P.; Augur, R. Electromigration Failure in Ultra-fine Copper Interconnects. J. Electron. Mater. 2003, 32, 988-993.
2. International Technology Roadmap for Semiconductors 2007 Edition: Executive Summary, page 42, http://www.itrs,net/Links/2007ITRS/ExecSum2007.pdf.
3. Huang, Q.; Lilley, C. M.; Divan, R. An In Situ Investigation of Electromigration in Cu Nanowires. Nanotechnology 2009, 20, 075706.
4. Wei, B. Q.; Vajtai, R.; Ajayan, P. M. Reliability and Current Carrying Capacity of Carbon Nanotubes. Appl. Phys. Lett. 2001, 79, 1172.
5. Naeemi, A.; Meindl, J. D. Monolayer Metallic Nanotube Interconnects: Promising Candidates for Short Local Interconnects. IEEE Electron Devices Lett. 2005, 26, 544-546.
6. Homma, Y.; Yamashita, T.; Kobayashi, Y.; Ogino, T. Interconnection of Nanostructures Using Carbon Nanotubes. Physica B: Phys. Condens. Matter 2002, 323, 122-123.
7. Li, J.; Ye, Q.; Cassell, A.; Ng, H. T.; Stevens, R.; Han, J.; Meyyappan, M. Bottom-Up Approach for Carbon Nanotube Interconnects. Appl. Phys. Lett. 2003, 82, 2491.
8. Nieuwoudt, A.; Massoud, Y. Evaluating the Impact of Resistance in Carbon Nanotube Bundles for VLSI Interconnect Using Diameter-Dependent Modeling Techniques. IEEE Trans. Electron Devices 2006, 53, 2460-2466.
9. Kreupl, F.; Graham, A. P.; Duesberg, G. S.; Steinhogl, W.; Liebau, M.; Unger, E.; Hoenlein, W. Carbon Nanotubes in Interconnect Applications. Microelectron. Eng. 2002, 64, 399-408.
10. Koo, K. H.; Cho, H.; Kapur, P.; Saraswat, K. C. Performance Comparisons between Carbon Nanotubes, Optical, and Cu for Future High-Performance On-Chip Interconnect Applications. IEEE Trans. Electron Devices 2007, 54, 3206-3215.
11. Naeemi, A.; Meindl, J. D. Design and Performance Modeling for Single-Walled Carbon Nanotubes as Local, Semiglobal, and Global Interconnects in Gigascale Integrated Systems. IEEE Trans. Electron Devices 2007, 54, 26-37.
12. Naeemi, A.; Meindl, J. D. Compact Physical Models for Multiwall Carbon-Nanotube Interconnects. IEEE Electron Devices Lett. 2006, 27, 338-340.
13. Chen, Y. C.; Raravikar, N. R.; Schadler, L. S.; Ajayan, P. M.; Zhao, Y. P.; Lu, T. M.; Wang, G. C.; Zhang, X. C. Ultrafast Optical Switching Properties of Single-Wall Carbon Nanotube Polymer Composites at 1.55 μ. Appl. Phys. Lett. 2002, 81, 975.
14. Xiong, X.; Jaberansari, L.; Hahm, M. G.; Busnaina, A.; Jung, Y.J. Building Highly Organized Single-Walled-carbon- Nanotube Networks Using Template-Guided Fluidic Assembly. Small 2007, 3, 2006.
15. Jaber-Ansari, L.; Hahm, M. G.; Somu, S.; Sanz, Y. E.; Busnaina, A.; Jung, Y. J. Mechanism of Very Large Scale Assembly of SWNTs in Template Guided Fluidic Assembly Process. J. Am. Chem. Soc. 2008, 131, 804-808.
16. Kar, S.; Soldano, C.; Chen, L.; Talapatra, S.; Vajtai, R.; Nayak, S.; Ajayan, P. M. Luttinger Liquid to Al'tshuler-Aronov Transition in Disordered, Many-Channel Carbon Nanotubes. ACS Nano 2009, 3, 207.
17. Mustonen, T.; Ma7die;klin, J.; Kordás, K.; Halonen, N.; Tóth, G.; Saukko, S.; Väha7die;kangas, J.; Jantunen, H.; Kar, S.; Ajayan, P. M. Controlled Ohmic and Nonlinear Electrical Transport in Inkjet-Printed Single-Wall Carbon Nanotube Films. Phys. Rev.B 2008, 77, 125430.
18. Zhou, Y.; Gaur, A.; Hur, S. H.; Kocabas, C.; Meitl, M. A.; Shim, M.; Rogers, J. A. p-Channel, n-Channel Thin Film Transistors and pn Diodes Based on Single Wall Carbon Nanotube Networks. Nano Lett. 2004, 4, 2031-2036.
19. Kocabas, C.; Pimparkar, N.; Yesilyurt, O.; Kang, S. J.; Alam, M. A.; Rogers, J. A. Experimental and Theoretical Studies of Transport through Large Scale, Partially Aligned Arrays of Single-Walled Carbon Nanotubes in Thin Film Type Transistors. Nano Lett. 2007, 7, 1195-1202.
20. Vijayaraghavan, A.; Kanzaki, K.; Suzuki, S.; Kobayashi, Y.; Inokawa, H.; Ono, Y.; Kar, S.; Ajayan, P. M. Metal- Semiconductor Transition in Single-Walled Carbon Nanotubes Induced by Low-Energy Electron Irradiation. Nano Lett. 2005, 5, 1575-1579.
21. Datta, S. Quantum Transport: Atom to Transistor; Cambridge University Press: Cambridge, UK, 2005.
22. Naeemi, A.; Meindl, J. D. Performance Modeling for Single- and Multiwall Carbon Nanotubes as Signal and Power Interconnects in Gigascale Systems. IEEE Trans. Electron Devices 2008, 55, 2574-2582.
23. Chen, L. Ph.D. Thesis; Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, 2008.
24. Fischer, J. E.; Dai, H.; Thess, A.; Lee, R.; Hanjani, N. M.; Dehaas, D. L.; Smalley, R. E. Metallic Resistivity in Crystalline Ropes of Single-Wall Carbon Nanotubes. Phys. Rev. B: Condens. Matter 1997, 55, 4921.
25. Hone, J.; Llaguno, M. C.; Nemes, N. M.; Johnson, A. T.; Fischer, J. E.; Walters, D. A.; Casavant, M. J.; Schmidt, J.; Smalley, R. E. Electrical and Thermal Transport Properties of Magnetically Aligned Single Wall Carbon Nanotube Films. Appl. Phys. Lett. 2000, 77, 666.
26. Nihei, M.; Kawabata, A.; Kondo, D.; Horibe, M.; Sato, S.; Awano, Y. Electrical Properties of Carbon Nanotube Bundles for Future via Interconnects. Jpn. J. Appl. Phys. 2005, 44, 1626-1628. (Pubitemid 40892534)
27. Yao, Z.; Kane, C. L.; Dekker, C. High-Field Electrical Transport in Single-Wall Carbon Nanotubes. Phys. Rev. Lett. 2000, 84, 2941-2944.