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Volumn 20, Issue 3, 2011, Pages

Active species downstream of an Ar-O2 surface-wave microwave discharge for biomedicine, surface treatment and nanostructuring

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE SPECIES; DENSITY DISTRIBUTIONS; DISSOCIATION DEGREE; FLOWING AFTERGLOWS; IODINE LASERS; ION DENSITY; LOW PRESSURES; MAIN COMPONENT; METASTABLE MOLECULES; MICROWAVE DISCHARGE; MIXTURE COMPOSITIONS; NANO-STRUCTURING; OPERATING CONDITION; OXYGEN SPECIES; PENNING IONIZATION; RESONANT STATE; THEORETICAL MODELS; TIME-DEPENDENT DENSITY; UV-EMITTING;

EID: 79957703002     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/20/3/035006     Document Type: Article
Times cited : (52)

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