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Volumn 41, Issue 11, 2008, Pages
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Inactivation of Bacillus atrophaeus and of Aspergillus niger using beams of argon ions, of oxygen molecules and of oxygen atoms
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
DEFECTS;
ETCHING;
FUNGUS PROTECTION;
PLASMAS;
SPUTTERING;
ARGON IONS;
INACTIVATION;
LOW PRESSURE PLASMAS;
SIGNIFICANT INACTIVATION;
BACTERIA;
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EID: 44449134916
PISSN: 00223727
EISSN: 13616463
Source Type: Journal
DOI: 10.1088/0022-3727/41/11/115207 Document Type: Article |
Times cited : (64)
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References (31)
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