Determination of O atom density in Ar-O2 and Ar-O2-H2 flowing microwave discharges

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1411-1415

  Czerwiec, T ^a   Gavillet, J ^a   Belmonte, T ^a   Michel, H ^a   Ricard, A ^b  

^a INSTITUT JEAN LAMOUR   (France)

^b UNIVERSITÉ PARIS SUD   (France)

Author keywords

Chemiluminescence; Optical emission spectroscopy; Plasma

Indexed keywords

EID: 0000525218     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00256-9     Document Type: Article

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