Theoretical insight into Ar-O2 surface-wave microwave discharges

Journal of Physics D: Applied Physics

Volumn 43, Issue 17, 2010, Pages

  Kutasi, Kinga ^a   Guerra, Vasco ^b   Paulo, S A ^b,c  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

^c UNIVERSITY OF PORTO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SURFACES; CYLINDRICAL TUBES; DISCHARGE CONDITIONS; DISCHARGE TUBE; DISSOCIATION DEGREE; ELECTRON DENSITIES; ELECTRON KINETICS; EXPERIMENTAL DATA; KINETIC MODELS; MICROWAVE DISCHARGE; MIXTURE COMPOSITIONS; NEUTRAL SPECIES; PARTICLE KINETICS; QUARTZ TUBES; SPECIES DENSITY; SURFACE WAVE DISCHARGE; SYSTEMATIC STUDY; ZERO-DIMENSIONAL;

ARGON; CHEMICAL BONDS; DATA FLOW ANALYSIS; DISSOCIATION; ELECTRIC FIELDS; ELECTRON TEMPERATURE; ELECTRONEGATIVITY; MICROWAVES; MIXTURES; OXIDE MINERALS; QUARTZ; SURFACE DISCHARGES;

MICROWAVE TUBES;

EID: 77951085387     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/17/175201     Document Type: Article

References (68)

1. Moreau S, Moisan M, Tabrizian M, Barbeau J, Pelletier J, Ricard A and Yahia L H 2000 J. Appl. Phys. 88 1166
2. Kitajima T, Nakano T and Makabe T 2006 Appl. Phys. Lett. 88 091501
3. Mafra M, Belmonte T, Poncin-Epaillard F, Maliska A and Cvelbar U 2009 Plasma Process. Polym. 6 S198
4. Rawlins W T, Lee S, Kessler W J and Davis S J 2005 Appl. Phys. Lett. 86 051105
5. Ionin A A, Kochetov I V, Napartovich A P and Yuryshev N N 2007 J. Phys. D: Appl. Phys. 40 R25
6. Bauville G, Lacour B, Magne L, Puech V, Boeuf J P, Mũoz-Serrano E and Pitchford L C 2007 Appl. Phys. Lett. 90 031501
7. Santos Sousa J, Bauville G, Lacour B, Puech V, Touzeau M and Pitchford L 2008 Appl. Phys. Lett. 93 011502
8. Raballand V, Benedikt J, Wunderlich J and von Keudell A 2008 J. Phys. D: Appl. Phys. 41 115207
9. Yasuda Y, Zaima S, Kaida T and Koide Y 1990 J. Appl. Phys. 67 2603
10. Belmonte T, Czerwiec T, Gavillet J and Michel H 1997 Surface Coat. Technol. 97 642
11. Drenik A, Cvelbar U, Ostrikov K and Mozeti M 2008 J. Phys. D: Appl. Phys. 41 115201
12. Nagatsu M, Terashita F, Nonaka H, Xu L, Nagata T and Koide Y 2005 Appl. Phys. Lett. 86 211502
13. Vujoevic D, Mozeti M, Cvelbar U, Krstulović N and Miloevic S 2007 J. Appl. Phys. 101 103305
14. Halfmann H, Denis B, Bibinov N, Wunderlich J and Awakowicz P 2007 J. Phys. D: Appl. Phys. 40 5907
15. Kylin O and Rossi F 2009 J. Phys. D: Appl. Phys. 42 085207
16. Balazs D J, Triandafillu K, Wood P, Chevolot Y, van Delden C, Harms H, Hollenstein C and Mathieu H J 2004 Biomaterials 25 2139
17. Amanatides E, Mataras D, Katsikogianni M and Missirlis Y F 2006 Surf. Coat. Technol. 200 6331
18. Mafra M, Belmonte T, Maliska A, da Silva Sobrinho A S, Cvelbar U and Poncin-Epaillard F 2008 Key Eng. Mater. 373-374 421
19. Ricard A, Gaillard M, Monna V, Vesel A and Mozeti M 2001 Surf. Coat. Technol. 142-144 333
20. Ricard A and Monna V 2002 Plasma Sources Sci. Technol. 11 A150
21. Ricard A, Monna M and Mozeti M 2003 Surf. Coat. Technol. 174-175 905
22. Czerwiec T, Gavillet J, Belmonte T, Michel H and Ricard A 1998 Surf. Coat. Technol. 98 1411
23. Mozeti M, Ricard A, Babi D, Poberaj I, Levaton J, Monna V and Cvelbar U 2003 J. Vac. Sci. Technol. A 21 369
24. Mozeti M, Vesel A, Cvelbar U and Ricard A 2006 Plasma Chem. Plasma Process. 26 103
25. Granier A, Pasquiers S, Boisse-Laporte C, Darchicourt R, Leprince P and Marec J 1989 J. Phys. D: Appl. Phys. 22 1487
26. Pinheiro M J, Gousset G, Granier A and Ferreira C M 1998 Plasma Sources Sci. Technol. 7 524
27. Pinheiro M J, Gordiets B F and Ferreira C M 1999 Plasma Sources Sci. Technol. 8 31
28. Tristant P, Gousset G, Régnier C and Desmaison J 2002 Plasma Sources Sci. Technol. 11 241
29. S P, Loureiro J and Ferreira C M 1992 J. Phys. D: Appl. Phys. 25 960
30. S P, Loureiro J and Ferreira C M 1994 J. Phys. D: Appl. Phys. 27 1171
31. Gudmundsson J T, Kouznetsov I G, Patel K K and Lieberman M A 2001 J. Phys. D: Appl. Phys. 34 1100
32. Gudmundsson J T and Thorsteinsson E G 2007 Plasma Sources Sci. Technol. 16 399
33. Sato T and Makabe T 2008 J. Phys. D: Appl. Phys. 41 035211
34. Hayashi Y, Hirao S, Zhang Y, Gans T, O'Connell D, Petrović Z Lj and Makabe T 2009 J. Phys. D: Appl. Phys. 42 145206
35. Mérel P, Tabbal M, Chaker M, Moisan M and Ricard A 1998 Plasma Sources Sci. Technol. 7 550
36. Boisse-Laporte C, Chave-Normand C and Marec J 1997 Plasma Sources Sci. Technol. 6 70
37. Guerra V, Tatarova E, Dias F M and Ferreira C M 2002 J. Appl. Phys. 91 2648
38. Ferreira C M and Loureiro J 2000 Plasma Sources Sci. Technol. 9 528
39. Ferreira C M and Loureiro J 1989 J. Phys. D: Appl. Phys. 22 76
40. Guerra V and Loureiro J 1999 Plasma Sources Sci. Technol. 8 110
41. Philip N, Saoudi B, Crevier M-C, Moisan M, Barbeau J and Pelletier J 2002 IEEE Trans. Plasma Sci. 30 1429
42. Ferreira C M, Loureiro J and Ricard A 1985 J. Appl. Phys. 57 82
43. Ferreira C M and Loureiro J 1983 J. Phys. D: Appl. Phys. 16 1611
44. Piper L G, Velazco J E and Setser D W 1973 J. Chem. Phys. 59 3323
45. Balamuta J and Golde M F 1982 J. Phys. Chem. 86 2765
46. Olsen R E, Peterson J R and Moseley J 1970 J. Chem. Phys. 53 3391
47. Borrell P M, Borrell P, Grant K R and Pedley M D 1982 J. Phys. Chem. 86 700
48. Midey A J and Viggiano A A 1998 J. Chem. Phys. 109 5257
49. Gousset G, Pinheiro M, S P A, Touzeau M, Vialle M and Loureiro J 1991 J. Phys. D: Appl. Phys. 24 290
50. Eliasson B and Kogelschatz U 1986 Brown Boveri Forschungszentrum Report KLR 86-11 C
51. Belostotsky S B, Economou D J, Lopaev D V and Rakhimova T V 2005 Plasma Sources Sci. Technol. 14 532
52. Kossyi I A, Kostinsky A Yu, Matveyev A A and Silakov V P 1992 Plasma Sources Sci. Technol. 1 207
53. Feoktistov V A, Mukhovatova A V, Popov A M and Rakhimova T V 1995 J. Phys. D: Appl. Phys. 28 1346
54. Heidner R F III, Gardner C E, El-Sayed T M, Segal J I and Kasper J V V 1981 J. Chem. Phys. 74 5618
55. Gordiets B, Ferreira C M, Guerra V, Loureiro J, Nahorny J, Pagnon D, Touzeau M and Vialle M 1995 IEEE TRans. Plasma Sci. 23 750
56. Macko P, Veis P and Cernogora G S 2004 Plasma Sources Sci. Technol. 13 251
57. Rohlena K and Maek K 1985 Acta Phys. Slovaca 35 141
58. Loureiro J 1991 Chem. Phys. 157 157
59. Cheng T S, Wu C Y, Chen C P, Li Y H, Chao Y C, Yuan T and Leu T S 2006 Combust. Flame 146 268
60. Hirschfelder J O, Curtiss C F and Bird R B 1964 Molecular Theory of Gases and Liquids (New York: Wiley)
61. Tachibana K and Phelps A V 1981 J. Chem. Phys. 75 3315
62. Lawton S A and Phelps A V 1978 J. Chem. Phys. 69 1055
63. Mũoz A G 2007 Planet. Space Sci. 55 1414
64. de Vries N, Palomares J M, van Harskamp W J, Iordanova E I, Kroesen G M W and van der Mullen J J A M 2008 J. Phys. D: Appl. Phys. 41 105209
65. Pollak J, Moisan M, Kéroack D and Boudam M K 2008 J. Phys. D: Appl. Phys. 41 135212
66. Belmonte T, Pintassilgo C D, Czerwiec T, Henrion G, Hody V, Thiebaut J M and Loureiro J 2005 Surf. Coat. Technol. 200 26
67. Rauf S and Kushner M J 1997 J. Appl. Phys. 82 2805
68. Kutasi K and Loureiro J 2007 J. Phys. D: Appl. Phys. 40 5612