Increased O (1D) metastable density in highly Ar-diluted oxygen plasmas

Applied Physics Letters

Volumn 88, Issue 9, 2006, Pages

  Kitajima, Takeshi ^a   Nakano, Toshiki ^a   Makabe, Toshiaki ^b  

^a NATIONAL DEFENSE ACADEMY   (Japan)

^b KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; FABRICATION; LIGHT ABSORPTION; MICROELECTRONICS; OXYGEN; SILICA; SPECTROSCOPY; VACUUM;

METASTABLE DENSITY; OXYGEN DISSOCIATION FRACTION; OXYGEN PLASMAS; SURFACE ACTIVATION;

PLASMA APPLICATIONS;

EID: 33644685629     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2180871     Document Type: Article

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