Realisation and characterisation of mass-based diamond micro-transducers working in dynamic mode

Sensors and Actuators, B: Chemical

Volumn 154, Issue 2, 2011, Pages 142-149

  Bongrain, Alexandre ^a   Scorsone, Emmanuel ^a   Rousseau, Lionel ^b   Lissorgues, Gaëlle ^b   Bergonzo, Philippe ^a  

^a CEA SACLAY   (France)

^b National Centre of Scientific Research   (France)

Author keywords

Diamond cantilevers; Mass based sensors; Polycrystalline diamond

Indexed keywords

BIOSENSING; CHARACTERISATION; CHEMICAL VAPOUR DEPOSITION; DOPPLER; DYNAMIC MODES; EXPERIMENTAL DATA; LIMIT OF DETECTION; MASS SENSITIVITY; MASS-BASED SENSORS; MEMS-STRUCTURE; PATTERNED GROWTH; POLYCRYSTALLINE DIAMOND; Q-FACTORS; RESONANCE FREQUENCIES; RESONANT FREQUENCIES; SILICON DEVICES; SILICON STRUCTURES; SIMULATION DATA;

CHEMICAL VAPOR DEPOSITION; DIAMONDS; GOLD DEPOSITS; LASER INTERFEROMETRY; NANOCANTILEVERS; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; SENSORS; TRANSDUCERS;

SYNTHETIC DIAMONDS;

EID: 79955650305     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.12.067     Document Type: Conference Paper

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